{"id":"W6996435109","doi":"","title":"Silicon nitride and silicon dioxide thin insulating films VII : proceedings of the international symposium","year":2003,"lang":"en","type":"other","venue":"NPARC","topic":"High voltage insulation and dielectric phenomena","field":"Materials Science","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"","keywords":"Microelectronics; Silicon nitride; Fabrication; Characterization (materials science); Thin film; Quantum tunnelling; Dielectric; Silicon dioxide","routes":{"ca_aff":false,"ca_fund":false,"ca_venue":true,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002837518,0.000552604,0.000310182,0.0004114973,0.0004038169,0.001107213,0.0004346438,0.0005147659,0.01762953],"category_scores_gemma":[0.0001554847,0.0001530157,0.0002064552,0.0004223446,0.0001281868,0.0005557074,0.0003354363,0.0005788206,0.005395606],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004112655,"about_ca_system_score_gemma":0.000592165,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0009674619,"about_ca_topic_score_gemma":0.003660231,"domain_scores_codex":[0.9998846,0.00000816709,0.000004362424,0.00001372862,0.00006604857,0.00002301522],"domain_scores_gemma":[0.9998701,0.00001135256,0.000005763129,0.000008947552,0.00006599245,0.00003784521],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"design_other","study_design_gemma":"not_applicable","study_design_scores_codex":[0.0005848322,0.0003258063,0.00102403,0.000642852,0.00007003664,0.0007384357,0.0002288001,0.0008484376,0.1171316,0.01111459,0.4012221,0.4660684],"study_design_scores_gemma":[0.0000214764,0.0001334865,0.001946978,0.00009685867,0.00004579606,0.0004210375,0.0001034929,0.001344165,0.04329393,0.001555453,0.9510256,0.00001171557],"study_design_candidate":"not_applicable","study_design_consensus":null,"genre_codex":"other","genre_gemma":"other","genre_scores_codex":[0.08824421,0.1334922,0.02247176,0.0079313,0.04182989,0.0001765297,0.00106107,0.001049696,0.7037434],"genre_scores_gemma":[0.0767723,0.04720712,0.00814867,0.0004663565,0.002709287,0.00005487249,0.001388569,0.0001714783,0.8630813],"genre_candidate":"other","genre_consensus":"other","teacher_disagreement_score":0.01762953,"threshold_uncertainty_score":0.05897665,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008588925074967566,"score_gpt":0.2174286195424738,"score_spread":0.2088396944675062,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}