{"id":"W7009198451","doi":"","title":"Developments in materials and processes: key to advances in thin film design","year":2004,"lang":"en","type":"article","venue":"NPARC","topic":"Copper Interconnects and Reliability","field":"Materials Science","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"","keywords":"Key (lock); Thin film; Troubleshooting","routes":{"ca_aff":false,"ca_fund":false,"ca_venue":true,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0005734506,0.00009624626,0.0001660427,0.00006921125,0.00003131263,0.00006497212,0.0001477041,0.00004234986,0.0002652881],"category_scores_gemma":[0.0002918679,0.0000745338,0.000004997977,0.0001662147,0.0000374643,0.0002526047,0.00006412082,0.00003962043,0.00006509184],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00007890062,"about_ca_system_score_gemma":0.000133917,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00009016113,"about_ca_topic_score_gemma":0.0004932383,"domain_scores_codex":[0.9990839,0.00005092365,0.0002432584,0.0002856702,0.0001164589,0.0002197879],"domain_scores_gemma":[0.9997233,0.00005558735,0.00003066665,0.0001041508,0.00003327871,0.0000529781],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00009476623,0.00007732707,0.0008729557,0.0001392333,6.37175e-7,0.00001077853,0.004067944,0.0008618837,0.9925845,0.0003812819,0.00003716566,0.000871477],"study_design_scores_gemma":[0.0005058285,0.00007860806,0.005134261,0.0002689145,0.000001041991,0.000004516869,0.000237533,0.000003593448,0.9776858,0.01449422,0.00142676,0.0001589111],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9966599,0.0001241712,0.0004168199,0.0003571316,0.0001928593,0.0003302726,0.000006813908,0.00002234713,0.001889672],"genre_scores_gemma":[0.9805257,0.0000756332,0.0191056,0.0001699087,0.00001332856,0.00006040697,6.800695e-7,0.00000635165,0.00004240391],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.01868878,"threshold_uncertainty_score":0.30394,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01663880207857564,"score_gpt":0.265055583469001,"score_spread":0.2484167813904254,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}