{"id":"W7009198451","doi":"","title":"Developments in materials and processes: key to advances in thin film design","year":2004,"lang":"en","type":"article","venue":"NPARC","topic":"Copper Interconnects and Reliability","field":"Materials Science","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"","keywords":"Key (lock); Thin film; Troubleshooting","routes":{"ca_aff":false,"ca_fund":false,"ca_venue":true,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00368206,0.0008868526,0.0008121452,0.001112234,0.0009324139,0.003297013,0.00138489,0.003126737,0.02322644],"category_scores_gemma":[0.004485941,0.0007085328,0.000423685,0.00153324,0.001646806,0.005607672,0.001097753,0.006040507,0.01239045],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.001660353,"about_ca_system_score_gemma":0.003220829,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001148381,"about_ca_topic_score_gemma":0.001987319,"domain_scores_codex":[0.998598,0.0001922848,0.0001115872,0.0002125048,0.000762875,0.000122843],"domain_scores_gemma":[0.9954799,0.001017192,0.0002739919,0.0004253653,0.002386392,0.0004171038],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"design_other","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0004161389,0.0003905365,0.0005821856,0.003394745,0.00003828845,0.0003363839,0.0002989261,0.001765669,0.05049753,0.2117964,0.1997937,0.5306895],"study_design_scores_gemma":[0.00004532247,0.0002618134,0.000485699,0.0003304966,0.00002455797,0.0003712604,0.00005085053,0.001737312,0.02808106,0.02621107,0.9423648,0.00003572653],"study_design_candidate":"bench_or_experimental","study_design_consensus":null,"genre_codex":"review","genre_gemma":"empirical","genre_scores_codex":[0.01206864,0.4540459,0.1210258,0.08736999,0.04078363,0.0004942815,0.000873993,0.001190038,0.2821477],"genre_scores_gemma":[0.07101554,0.4290618,0.2053594,0.01005778,0.01841388,0.0002911588,0.0009852686,0.0009908956,0.2638243],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.02322644,"threshold_uncertainty_score":0.0777002,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01663880207857564,"score_gpt":0.265055583469001,"score_spread":0.2484167813904254,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}