{"id":"W7011658729","doi":"","title":"A new KOH-based UV assisted wet etching technique and its alication to AlGaN/GaN HFET fabrication and characterization","year":2000,"lang":"en","type":"article","venue":"NPARC","topic":"GaN-based semiconductor devices and materials","field":"Physics and Astronomy","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"","keywords":"Characterization (materials science); Fabrication; Etching (microfabrication); Dry etching; Process (computing)","routes":{"ca_aff":false,"ca_fund":false,"ca_venue":true,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["insufficient_payload"],"consensus_categories":[],"category_scores_codex":[0.0001095821,0.0001223729,0.000138837,0.0000590863,0.00008477114,0.0001097674,0.00006541616,0.00004402582,0.001110014],"category_scores_gemma":[0.000004592202,0.0001222909,0.00001914799,0.0001180788,0.000007267801,0.0001726674,0.00001071468,0.00005070949,0.00002231189],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00001369823,"about_ca_system_score_gemma":0.00003827893,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001000095,"about_ca_topic_score_gemma":0.000002199852,"domain_scores_codex":[0.9993095,0.00004503965,0.0001839859,0.0002452896,0.00008052303,0.0001356739],"domain_scores_gemma":[0.9995827,0.00001775236,0.00008635914,0.0001471172,0.00005072334,0.0001153668],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001445747,0.00001955596,0.001080433,0.00001486053,0.000006949981,1.04687e-7,0.0001316326,0.000002950587,0.9270682,0.000683988,0.0001400361,0.07083682],"study_design_scores_gemma":[0.0006774217,0.00008712548,0.06308267,0.0001105461,0.00005043736,0.000002290195,0.00003346011,0.001277935,0.9106214,0.001752224,0.02193562,0.0003688455],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9788412,0.000006331662,0.01785333,0.0009410854,0.00004197107,0.0005213508,0.00006221745,0.00005546876,0.001677003],"genre_scores_gemma":[0.9963149,0.000003996624,0.002417315,0.0002830919,0.0001653869,0.00008371599,0.0003645229,0.00001766976,0.00034944],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.07046798,"threshold_uncertainty_score":0.9998031,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01246531207505627,"score_gpt":0.2449561905911739,"score_spread":0.2324908785161177,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}