{"id":"W7019012770","doi":"","title":"Fabrication and characterization of an electrically variable, nanospring based interferometer","year":2007,"lang":"en","type":"article","venue":"NPARC","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"","keywords":"Fabrication; Characterization (materials science); Interferometry; Process (computing); Etching (microfabrication)","routes":{"ca_aff":false,"ca_fund":false,"ca_venue":true,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003644391,0.000189224,0.0002301268,0.0003110449,0.0004666972,0.0003748998,0.0005943712,0.0005970081,0.002830841],"category_scores_gemma":[0.000631318,0.0002204878,0.0001017446,0.0001808964,0.0002515374,0.0005139394,0.0002445919,0.0002690856,0.0008195536],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003077988,"about_ca_system_score_gemma":0.0003410259,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003826699,"about_ca_topic_score_gemma":0.001272455,"domain_scores_codex":[0.9996068,0.00002900107,0.00001640648,0.00007233524,0.0002364101,0.00003909296],"domain_scores_gemma":[0.9994721,0.0001244011,0.00007827726,0.00007836719,0.0002047584,0.00004208598],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00006416041,0.00003584405,0.00102604,0.00002592512,0.000004245476,0.00007928043,0.00007881259,0.0001143009,0.9920202,0.0003273561,0.0004130229,0.00581078],"study_design_scores_gemma":[0.00001858585,0.0002734757,0.00661035,0.000003865245,0.00001008201,0.0001905185,0.00005415772,0.003684788,0.984063,0.00006434308,0.005013769,0.00001306556],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9589515,0.0001761223,0.03278144,0.0004666448,0.0001311756,0.0002004896,0.0003562085,0.0006149149,0.006321397],"genre_scores_gemma":[0.9605269,0.00008180591,0.03006679,0.0001625166,0.00002694145,0.0001042572,0.0002129602,0.00006829086,0.008749621],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002830841,"threshold_uncertainty_score":0.009470105,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005981720946275725,"score_gpt":0.2051993282857079,"score_spread":0.1992176073394322,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}