{"id":"W7020892113","doi":"","title":"Microstructured Humidity Sensors Fabricated by Glancing Angle Deposition: Characterization and Performance Evaluation","year":2007,"lang":"en","type":"article","venue":"NPARC","topic":"Optical Coatings and Gratings","field":"Materials Science","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"","keywords":"Characterization (materials science); Humidity; Coating; Thin film; Substrate (aquarium)","routes":{"ca_aff":false,"ca_fund":false,"ca_venue":true,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002962569,0.0001385057,0.0003072415,0.0002360008,0.0002399555,0.0002871548,0.0003845523,0.0004890665,0.002160241],"category_scores_gemma":[0.0008295252,0.0002493395,0.0001327088,0.0002313116,0.0001672706,0.0003495662,0.0001291698,0.0001884372,0.0008313615],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002713325,"about_ca_system_score_gemma":0.0002318055,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0008067628,"about_ca_topic_score_gemma":0.003607502,"domain_scores_codex":[0.9995602,0.00002386913,0.0000191897,0.00006113702,0.0002995846,0.00003602739],"domain_scores_gemma":[0.9993308,0.00006124249,0.0000857858,0.00006057791,0.0004308974,0.00003074131],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00008611418,0.00002083721,0.001243007,0.00005988027,0.000007511095,0.00004502885,0.00002797012,0.00005927132,0.9921671,0.00004115609,0.00045851,0.005783584],"study_design_scores_gemma":[0.0000225815,0.0003158893,0.01315612,0.000003328739,0.00001514521,0.0001335705,0.00003008916,0.0006347082,0.9833142,0.00001672094,0.002349749,0.00000789878],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9861262,0.001033931,0.008186469,0.000321918,0.0002019701,0.0001395481,0.0005459089,0.0004352071,0.0030088],"genre_scores_gemma":[0.9743096,0.000568646,0.01602932,0.0001637986,0.00006521123,0.00004278154,0.0005575368,0.00006533411,0.008197766],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002160241,"threshold_uncertainty_score":0.007226765,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0106189316385065,"score_gpt":0.2410124965427325,"score_spread":0.230393564904226,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}