{"id":"W7021138888","doi":"","title":"Nanoscale resist morphologies of dense gratings using electron-beam lithography","year":2007,"lang":"en","type":"article","venue":"NPARC","topic":"Advancements in Photolithography Techniques","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"","keywords":"Resist; Nanoscopic scale; Lithography; Electron-beam lithography; Photolithography; X-ray lithography; Substrate (aquarium)","routes":{"ca_aff":false,"ca_fund":false,"ca_venue":true,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003059867,0.000182792,0.0002298366,0.000322201,0.0000606922,0.00001168599,0.0002062875,0.0001021487,0.00002848459],"category_scores_gemma":[0.00003533612,0.0001896654,0.0001183717,0.0005831808,0.0001545495,0.0001167652,0.00003879688,0.0001778724,8.609594e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00004551017,"about_ca_system_score_gemma":0.000008325587,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001495522,"about_ca_topic_score_gemma":0.000007077634,"domain_scores_codex":[0.9988056,0.00001390592,0.0003666908,0.0001857539,0.0002028066,0.0004252624],"domain_scores_gemma":[0.9994043,0.0000700104,0.00007844805,0.0003300083,0.00006267167,0.00005452212],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001748224,0.00003238031,0.006765979,0.0000590426,0.00003792892,0.00001109449,0.00008311507,0.0001237013,0.9885017,0.0006487128,0.000350206,0.003368696],"study_design_scores_gemma":[0.000129022,0.00007122765,0.002112797,0.00006196526,0.00002006631,0.00001361292,0.00007785857,0.0003002189,0.9893669,0.006562521,0.001074804,0.0002089555],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9109626,0.0005504132,0.07779779,0.000004545614,0.0001254663,0.0002001287,0.00001051104,0.0006929827,0.009655504],"genre_scores_gemma":[0.8379409,0.0001282765,0.1618218,0.00002020601,0.00002482941,0.00001101619,0.000002452614,0.00003598774,0.0000145544],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.08402397,"threshold_uncertainty_score":0.7734331,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01041583602132252,"score_gpt":0.2604285927647844,"score_spread":0.2500127567434619,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}