{"id":"W7026542369","doi":"","title":"Absorbance measurement of polymers at EUV wavelength: Correlation between experimental and theoretical calculations","year":2006,"lang":"en","type":"article","venue":"NPARC","topic":"Zoonotic diseases and public health","field":"Medicine","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"","keywords":"Absorbance; Polymer; Extreme ultraviolet lithography; Correlation","routes":{"ca_aff":false,"ca_fund":false,"ca_venue":true,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00125328,0.0006999563,0.0005065485,0.000818942,0.0007793126,0.0006428055,0.001117943,0.0009822142,0.003768581],"category_scores_gemma":[0.005316326,0.0005433909,0.0006850052,0.0008657026,0.0005818714,0.0009293956,0.0003751697,0.00117335,0.001745854],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004152218,"about_ca_system_score_gemma":0.0002649535,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000631839,"about_ca_topic_score_gemma":0.0006126022,"domain_scores_codex":[0.9986499,0.0003460921,0.00004956033,0.0002359548,0.000601745,0.0001167725],"domain_scores_gemma":[0.9966665,0.001828667,0.0003956518,0.0003338454,0.0007217576,0.0000535449],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.001171837,0.000587268,0.01634636,0.002107898,0.0003089684,0.0005586238,0.0004018249,0.0168236,0.8732775,0.004111701,0.004055364,0.08024895],"study_design_scores_gemma":[0.00002091176,0.0005557412,0.01371518,0.00006156374,0.00008292701,0.0003672311,0.0001334717,0.03993801,0.9404017,0.001126632,0.0035363,0.00006020068],"study_design_candidate":"simulation_or_modeling","study_design_consensus":null,"genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9025617,0.007736011,0.0658525,0.0005534853,0.0005868117,0.0001217909,0.0005714067,0.0007575047,0.02125874],"genre_scores_gemma":[0.9825563,0.001894842,0.01192758,0.00009042128,0.00003854761,0.00004950469,0.0003619011,0.00007432909,0.003006594],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.003768581,"threshold_uncertainty_score":0.01260722,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02001291944179071,"score_gpt":0.277126003815336,"score_spread":0.2571130843735452,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}