{"id":"W7030151347","doi":"","title":"MEMS: fundamental technology and applications","year":2013,"lang":"en","type":"other","venue":"CERN Document Server (European Organization for Nuclear Research)","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"","keywords":"Popularity; State (computer science); History of computing; Work (physics)","routes":{"ca_aff":false,"ca_fund":false,"ca_venue":false,"about_ca":true,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004720413,0.001024466,0.0007488657,0.001132974,0.0009403201,0.003185144,0.0008667005,0.001880981,0.03661763],"category_scores_gemma":[0.0007343069,0.0005161247,0.0004089785,0.00136885,0.001207235,0.002319308,0.001514818,0.002317337,0.03211831],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0008595986,"about_ca_system_score_gemma":0.001062086,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0006709171,"about_ca_topic_score_gemma":0.0007476677,"domain_scores_codex":[0.9991764,0.00006056035,0.00003376936,0.0001108304,0.0005494686,0.00006889324],"domain_scores_gemma":[0.9997891,0.00004182808,0.00001718842,0.00003482755,0.00009165754,0.00002549609],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"not_applicable","study_design_gemma":"not_applicable","study_design_scores_codex":[0.00004912669,0.00004938039,0.0002756645,0.001268917,0.00002079889,0.0002273444,0.0004008058,0.0006964718,0.02093312,0.09556973,0.4478945,0.432614],"study_design_scores_gemma":[0.000003078898,0.00001956792,0.0002485771,0.0001368936,0.000003316718,0.0002416574,0.00005406138,0.0003276639,0.001990446,0.008875188,0.9880899,0.000009661413],"study_design_candidate":"not_applicable","study_design_consensus":"not_applicable","genre_codex":"other","genre_gemma":"other","genre_scores_codex":[0.003758546,0.2731274,0.04180663,0.01087343,0.01719226,0.0002250662,0.001092437,0.002244597,0.6496797],"genre_scores_gemma":[0.03440704,0.1483623,0.02224074,0.003376551,0.00513261,0.0003863676,0.001244882,0.0006104377,0.784239],"genre_candidate":"other","genre_consensus":"other","teacher_disagreement_score":0.03661763,"threshold_uncertainty_score":0.1224982,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0135175349804147,"score_gpt":0.2450808820243807,"score_spread":0.231563347043966,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}