{"id":"W7034041388","doi":"","title":"Silicon containing organic-inorganic hybrid materials as EUV photoresists","year":2005,"lang":"en","type":"article","venue":"NPARC","topic":"Numerical Methods and Algorithms","field":"Computer Science","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"","keywords":"Silicon; Extreme ultraviolet lithography; Hybrid material; Hybrid system; Process (computing)","routes":{"ca_aff":false,"ca_fund":false,"ca_venue":true,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["insufficient_payload"],"consensus_categories":["insufficient_payload"],"category_scores_codex":[0.0004369735,0.0001737801,0.0002741684,0.00005355135,0.0001246449,0.0002282567,0.000784552,0.00004562002,0.001886417],"category_scores_gemma":[0.0001637591,0.0001537101,0.00005142833,0.0002263993,0.00003794141,0.000329993,0.0002760686,0.0001156961,0.0008187566],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00006614161,"about_ca_system_score_gemma":0.00007107382,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001845343,"about_ca_topic_score_gemma":0.000001556817,"domain_scores_codex":[0.9984543,0.000149922,0.00029062,0.0004344129,0.0002682807,0.0004024943],"domain_scores_gemma":[0.9990122,0.0001424466,0.0001045942,0.0005106085,0.0000587223,0.0001714582],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00000705131,0.00003775721,0.00002161132,0.000004787492,0.00001033439,0.00002521862,0.0001738479,4.620814e-7,0.8746707,0.008022365,0.0004815351,0.1165443],"study_design_scores_gemma":[0.0003695723,0.0001624593,0.0005111783,0.00001775573,0.000006479067,0.0000747898,0.00001852824,0.00157294,0.9652866,0.0150546,0.01664584,0.0002792737],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7673124,0.00008855242,0.2177977,0.003383103,0.0009745616,0.0002530233,0.000007154519,0.0004845574,0.009698967],"genre_scores_gemma":[0.7825428,0.00001189295,0.2153243,0.001335118,0.0003473805,0.000009826746,0.000001376708,0.00001777389,0.0004094715],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.116265,"threshold_uncertainty_score":0.9999592,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01316300407553159,"score_gpt":0.263996832983639,"score_spread":0.2508338289081075,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}