{"id":"W7036778247","doi":"","title":"Challenges and solutions in laser micro fabrication of micro parts, mechanisms, and sensors","year":2007,"lang":"en","type":"article","venue":"NPARC","topic":"Laser Material Processing Techniques","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"","keywords":"Fabrication; Surface micromachining; Laser; Machining; Laser beam machining; Surface roughness; Microfabrication; Precision engineering","routes":{"ca_aff":false,"ca_fund":false,"ca_venue":true,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.003180453,0.000678634,0.0006540334,0.0007420053,0.0009450602,0.003174829,0.001655215,0.002340274,0.004289355],"category_scores_gemma":[0.001904712,0.0005174488,0.0003674109,0.0009349773,0.001697322,0.003239078,0.00117966,0.001989658,0.002312513],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0009603121,"about_ca_system_score_gemma":0.001333216,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005407513,"about_ca_topic_score_gemma":0.0009318889,"domain_scores_codex":[0.9978961,0.0003854435,0.00009996437,0.0003319098,0.001138139,0.0001483757],"domain_scores_gemma":[0.9980902,0.0009541014,0.0001876562,0.0002231584,0.0004917997,0.00005310349],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"design_other","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00008068352,0.0002421448,0.001798165,0.004652445,0.00005077268,0.0007221316,0.000943177,0.02267277,0.1502729,0.1630037,0.01212725,0.6434339],"study_design_scores_gemma":[0.00002848973,0.001002845,0.003999853,0.001261327,0.00007116928,0.005272083,0.003764272,0.07887074,0.1438947,0.1359956,0.6256183,0.0002206753],"study_design_candidate":"bench_or_experimental","study_design_consensus":null,"genre_codex":"methods","genre_gemma":"review","genre_scores_codex":[0.05935342,0.2037232,0.6160282,0.02284754,0.001970456,0.0002510545,0.0002963609,0.001180815,0.09434891],"genre_scores_gemma":[0.2000752,0.1092272,0.6485513,0.002263162,0.001306447,0.0004042678,0.0003315451,0.0002777967,0.03756312],"genre_candidate":"review","genre_consensus":null,"teacher_disagreement_score":0.004289355,"threshold_uncertainty_score":0.01682007,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02136567382358864,"score_gpt":0.2319877981493188,"score_spread":0.2106221243257302,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}