{"id":"W7065468582","doi":"","title":"Design and implementation of a plasma enhanced chemical vapour deposition (PECVD) system for the study of Cââ-polymer composite thin films and surface fuctionalization effects on Cââ","year":2004,"lang":"en","type":"other","venue":"Library and Archives Canada (Government of Canada)","topic":"Laser-Plasma Interactions and Diagnostics","field":"Physics and Astronomy","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"","keywords":"Thin film; Sublimation (psychology); Plasma-enhanced chemical vapor deposition; Composite number; Polymer; Plasma polymerization; Chemical vapor deposition; Polymerization","routes":{"ca_aff":false,"ca_fund":false,"ca_venue":true,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003316272,0.0002394014,0.0003081465,0.0001999294,0.0003222672,0.0004214079,0.0005694846,0.0003826266,0.001222974],"category_scores_gemma":[0.0002079804,0.0002818228,0.0001944014,0.0001443639,0.0002076864,0.000300914,0.0002000585,0.0004252584,0.000460905],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005496557,"about_ca_system_score_gemma":0.0006647434,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001119712,"about_ca_topic_score_gemma":0.00132224,"domain_scores_codex":[0.9998179,0.00001126837,0.000007864377,0.00006483751,0.00007592174,0.00002216474],"domain_scores_gemma":[0.9998673,0.00002482968,0.0000281912,0.00002182598,0.00003961902,0.00001823425],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001885,0.00002358469,0.000110216,0.000031072,0.000002068354,0.00001914086,0.00001194345,0.0002344218,0.9971823,0.0001960855,0.00003510055,0.002135222],"study_design_scores_gemma":[0.00001845794,0.0001902218,0.001129638,0.000001787367,0.000005928298,0.00008282206,0.000007207149,0.003329238,0.9921489,0.00002736453,0.003053332,0.000005163495],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7734783,0.0008609756,0.21605,0.0001867845,0.0001302632,0.001038016,0.0006415218,0.001336436,0.006277742],"genre_scores_gemma":[0.7287155,0.0007190612,0.2586008,0.00007623671,0.00003734643,0.001216054,0.0006004448,0.0001286873,0.009905795],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001222974,"threshold_uncertainty_score":0.004091263,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.002979056950932147,"score_gpt":0.1780833180557,"score_spread":0.1751042611047679,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}