{"id":"W7097250833","doi":"","title":"Fundamentals of semiconductor manufacturing and process control","year":2006,"lang":"en","type":"article","venue":"","topic":"Silicon and Solar Cell Technologies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"","keywords":"Permission; Process (computing); Authorization; Process control; Section (typography); Manufacturing process; Control (management)","routes":{"ca_aff":false,"ca_fund":false,"ca_venue":false,"about_ca":true,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0005923525,0.001089597,0.001048798,0.001583442,0.0007900369,0.002498901,0.001206471,0.0008785474,0.03167814],"category_scores_gemma":[0.0009173803,0.0004565332,0.0003939012,0.002027427,0.00118405,0.0009935872,0.0008738534,0.001659506,0.02267375],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.003034492,"about_ca_system_score_gemma":0.003878354,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.01515975,"about_ca_topic_score_gemma":0.02008516,"domain_scores_codex":[0.9991616,0.00004803433,0.0000393362,0.0001163515,0.0005545238,0.0000801669],"domain_scores_gemma":[0.999409,0.00006836023,0.00002574431,0.0001248076,0.0003433219,0.00002878456],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"design_other","study_design_gemma":"not_applicable","study_design_scores_codex":[0.0000994584,0.00009176494,0.0004870837,0.001034678,0.00005006026,0.0002898444,0.0003264644,0.01070891,0.02146099,0.2081415,0.1401829,0.6171263],"study_design_scores_gemma":[0.00001571626,0.0000562046,0.0006981383,0.0001737862,0.00001629623,0.0004181911,0.00005612795,0.01595517,0.008060102,0.04239215,0.9321198,0.00003830171],"study_design_candidate":"not_applicable","study_design_consensus":null,"genre_codex":"other","genre_gemma":"methods","genre_scores_codex":[0.004712612,0.06920967,0.4129202,0.003459327,0.007353698,0.0003084858,0.002235089,0.004278531,0.4955224],"genre_scores_gemma":[0.09740182,0.07103597,0.1595759,0.0005577896,0.001191008,0.0003411993,0.002157323,0.0006596972,0.6670794],"genre_candidate":"methods","genre_consensus":null,"teacher_disagreement_score":0.03167814,"threshold_uncertainty_score":0.105974,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.003876459902183208,"score_gpt":0.1818939544604123,"score_spread":0.1780174945582291,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}