{"id":"W7127090565","doi":"10.1109/powermems66515.2025.11358526","title":"Development of thin Film Piezoelectric Aluminum Nitride on Stainless Steel Substrates","year":2025,"lang":"","type":"article","venue":"","topic":"Acoustic Wave Resonator Technologies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"inVentiv Health Clinical","funders":"Air Force Research Laboratory","keywords":"Piezoelectricity; Nitride; Aluminium nitride; Aluminium; Thin film; Crystallinity; Sputtering; Surface roughness","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001565393,0.0003352271,0.0002187681,0.0002391333,0.0001215901,0.0002017998,0.000556673,0.0003454642,0.0008109821],"category_scores_gemma":[0.0002605404,0.0003201856,0.0002344251,0.0001772261,0.00007918862,0.0002250309,0.000306002,0.0002749386,0.0007360973],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002074536,"about_ca_system_score_gemma":0.0002646334,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0007801017,"about_ca_topic_score_gemma":0.002816919,"domain_scores_codex":[0.999828,0.000008199811,0.0000121075,0.00003185728,0.0001031883,0.00001656366],"domain_scores_gemma":[0.9998592,0.0000145771,0.00002882325,0.00001619526,0.00005786226,0.00002336857],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000004768921,0.000005240753,0.00008728751,0.00002655227,0.000001464426,0.00006607282,0.000007696292,0.0001181615,0.9981639,0.00003502438,0.00002864189,0.001455279],"study_design_scores_gemma":[0.000006626935,0.0001727054,0.001841868,0.000009383253,0.000006202165,0.0002156665,0.00002653473,0.003146055,0.9912475,0.00002327735,0.003296267,0.000008074796],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9466432,0.001809748,0.03952312,0.0001460877,0.0002865244,0.0003030711,0.0005970967,0.0004828317,0.01020825],"genre_scores_gemma":[0.8560954,0.002082694,0.1285817,0.00005845149,0.00003486259,0.0001837875,0.0008079978,0.0001045025,0.01205056],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0008109821,"threshold_uncertainty_score":0.002713025,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01230940507786316,"score_gpt":0.2329677533130947,"score_spread":0.2206583482352315,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}