{"id":"W7127924242","doi":"10.5281/zenodo.18490396","title":"EUV: A New Adventure in Lithography","year":2022,"lang":"","type":"article","venue":"Open MIND","topic":"Advancements in Photolithography Techniques","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Concordia University","funders":"","keywords":"Extreme ultraviolet lithography; Lithography; Resist; Next-generation lithography; Photolithography; Multiple patterning; X-ray lithography; Computational lithography","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00163485,0.0004806414,0.0007312797,0.001614447,0.0006463539,0.002327591,0.0009506978,0.001709841,0.006778738],"category_scores_gemma":[0.001204384,0.0003625774,0.0005607572,0.001995076,0.001738116,0.004833732,0.002195573,0.00457478,0.00436486],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0008840882,"about_ca_system_score_gemma":0.0009808962,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003951823,"about_ca_topic_score_gemma":0.0005605064,"domain_scores_codex":[0.9989366,0.0002139446,0.00008476004,0.0001906999,0.0004725218,0.0001014655],"domain_scores_gemma":[0.9990339,0.000444917,0.00008580359,0.0001119315,0.0002201679,0.0001032665],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"design_other","study_design_gemma":"not_applicable","study_design_scores_codex":[0.00008215259,0.00004218589,0.0004661753,0.002759393,0.00002996224,0.0003042253,0.0004716895,0.0002732318,0.01982596,0.1522589,0.07294855,0.7505375],"study_design_scores_gemma":[0.000002195163,0.00004689443,0.0001359276,0.000355217,0.000005163011,0.0004690121,0.00005481641,0.0001097778,0.003491763,0.00645616,0.9888604,0.00001273095],"study_design_candidate":"not_applicable","study_design_consensus":null,"genre_codex":"review","genre_gemma":"other","genre_scores_codex":[0.002335924,0.9025313,0.02843649,0.009688967,0.007644543,0.00003220997,0.0001548562,0.0005439674,0.0486318],"genre_scores_gemma":[0.03298604,0.8272391,0.0555936,0.01044124,0.006245918,0.0001000038,0.0004282658,0.0005388409,0.06642708],"genre_candidate":"other","genre_consensus":null,"teacher_disagreement_score":0.006778738,"threshold_uncertainty_score":0.02267718,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02362521002930008,"score_gpt":0.3034746490655587,"score_spread":0.2798494390362586,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}