{"id":"W7128070855","doi":"10.5281/zenodo.18490397","title":"EUV: A New Adventure in Lithography","year":2022,"lang":"","type":"article","venue":"Zenodo (CERN European Organization for Nuclear Research)","topic":"Advancements in Photolithography Techniques","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Concordia University","funders":"","keywords":"Extreme ultraviolet lithography; Lithography; Resist; Next-generation lithography; Photolithography; Multiple patterning; X-ray lithography; Computational lithography","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.001877491,0.0005072491,0.0007916556,0.001598376,0.0005950374,0.002440687,0.0009499708,0.001700712,0.006587063],"category_scores_gemma":[0.001181578,0.0003554196,0.0005578389,0.001910345,0.001734774,0.004564976,0.002336668,0.004318416,0.004642747],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0009786073,"about_ca_system_score_gemma":0.0009670542,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003503671,"about_ca_topic_score_gemma":0.0004872053,"domain_scores_codex":[0.9987814,0.0002664654,0.00009350728,0.0002263404,0.0005197691,0.0001126493],"domain_scores_gemma":[0.9991162,0.0003894974,0.00008204237,0.0001142769,0.0001971603,0.0001008023],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"design_other","study_design_gemma":"not_applicable","study_design_scores_codex":[0.00008979017,0.00003749896,0.0004123563,0.002527539,0.00003173403,0.0002687842,0.0003652349,0.0002953688,0.02069627,0.1642406,0.07259236,0.7384425],"study_design_scores_gemma":[0.0000024295,0.00004296137,0.0001161652,0.0002856929,0.000004608294,0.0004040983,0.00003620976,0.00008949659,0.003340379,0.005868764,0.9897985,0.00001050173],"study_design_candidate":"not_applicable","study_design_consensus":null,"genre_codex":"review","genre_gemma":"empirical","genre_scores_codex":[0.002346513,0.8882775,0.03551485,0.009263175,0.008258726,0.00003489372,0.0001866212,0.0006277233,0.05548996],"genre_scores_gemma":[0.03706762,0.7892824,0.07168783,0.011753,0.006473836,0.0001293785,0.0006300943,0.0007688117,0.08220699],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.006587063,"threshold_uncertainty_score":0.0220359,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02052520512189872,"score_gpt":0.2421050558774002,"score_spread":0.2215798507555014,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}