{"id":"W7132054260","doi":"","title":"Electron beam patterning with carboneous contamination rezists below 10 nm linewidth","year":2002,"lang":"en","type":"article","venue":"NPARC","topic":"Advanced Electron Microscopy Techniques and Applications","field":"Biochemistry, Genetics and Molecular Biology","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"","keywords":"Laser linewidth; Auger electron spectroscopy; Transmission electron microscopy; Crystallite; Permalloy; High-resolution transmission electron microscopy; Spectroscopy; Silicon; Diffusion","routes":{"ca_aff":false,"ca_fund":false,"ca_venue":true,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000277058,0.0002010966,0.0001576848,0.000141343,0.0002082042,0.00023213,0.000404113,0.0003563102,0.001204567],"category_scores_gemma":[0.0007390372,0.0001737102,0.0001022427,0.0001948791,0.0002567113,0.0001955712,0.0001784842,0.000344345,0.000320834],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000304715,"about_ca_system_score_gemma":0.000183458,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0006363805,"about_ca_topic_score_gemma":0.001621789,"domain_scores_codex":[0.9997779,0.00002077286,0.00001662651,0.00005468219,0.00009684302,0.00003307069],"domain_scores_gemma":[0.9991348,0.0003900939,0.0001419568,0.0001505725,0.000148024,0.00003451708],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002507127,0.00001137236,0.0002313398,0.00002633655,0.000002093955,0.00007121123,0.00002071725,0.00008668039,0.9973601,0.0001236923,0.00004102223,0.002000313],"study_design_scores_gemma":[0.00001059682,0.00006953256,0.001821665,0.000005802915,0.000004742023,0.0001337447,0.00001445161,0.000952527,0.9949581,0.0000695843,0.001955703,0.000003640116],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9658588,0.00103073,0.02914658,0.0001964377,0.0000505166,0.0000630375,0.0001879642,0.0002347431,0.00323127],"genre_scores_gemma":[0.946704,0.0006503638,0.0481486,0.0000777504,0.000009447768,0.00005730757,0.000276108,0.0001036768,0.003972786],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001204567,"threshold_uncertainty_score":0.004029751,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005364494841604516,"score_gpt":0.2566770510109925,"score_spread":0.251312556169388,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}