{"id":"W7132898729","doi":"","title":"Novel micro electrostatic actuators with applications","year":2006,"lang":"","type":"dissertation","venue":"TSpace","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Canadian Heritage; Library and Archives Canada","funders":"Advanced Research Projects Agency; Defense Advanced Research Projects Agency","keywords":"Actuator; Capacitor; Microelectromechanical systems; Stiffness; Comb drive; Rotation (mathematics); Surface micromachining; Voltage","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001082991,0.0004738509,0.000179118,0.0002428806,0.0002835717,0.0003818914,0.0004322543,0.0006241493,0.003889613],"category_scores_gemma":[0.0001090867,0.0001834729,0.0002264851,0.0002435083,0.0001758518,0.0005404707,0.0004150077,0.000341433,0.001434047],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002343717,"about_ca_system_score_gemma":0.0002122525,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001681261,"about_ca_topic_score_gemma":0.000441213,"domain_scores_codex":[0.9998569,0.000005888961,0.000007566546,0.00002645625,0.00008561604,0.00001759236],"domain_scores_gemma":[0.9999439,0.000009407707,0.00001118858,0.000005535682,0.00002265093,0.000007389133],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004729607,0.00003713558,0.0003450825,0.0005189219,0.00001357708,0.0003860092,0.000101285,0.001282477,0.8808475,0.01502324,0.006952258,0.09444516],"study_design_scores_gemma":[0.00003836116,0.0003115347,0.002085328,0.00006040471,0.00003088992,0.001855336,0.00007405295,0.01705282,0.5595855,0.002906353,0.4159512,0.00004834773],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.3361095,0.06645119,0.3285412,0.003900379,0.00350575,0.0004588485,0.0009211139,0.003448741,0.2566632],"genre_scores_gemma":[0.6706998,0.01829463,0.1562369,0.001272817,0.0007072137,0.0002927444,0.0004746901,0.0001215558,0.1518997],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.003889613,"threshold_uncertainty_score":0.01301205,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006446321578902987,"score_gpt":0.2710210444651875,"score_spread":0.2645747228862845,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}