{"id":"W7146210193","doi":"","title":"Xenonガスジェット型13.5 nm 極端紫外線プラズマ光源のZピンチダイナミクスに関する研究","year":2014,"lang":"en","type":"article","venue":"Institutional Repositories DataBase (IRDB)","topic":"Military Technology and Strategies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"Queen's University; Japan Society for the Promotion of Science; Queen's University Belfast","keywords":"Extreme ultraviolet lithography; Extreme ultraviolet; Plasma; Xenon; Radiation; Wavelength; Electron density","routes":{"ca_aff":false,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00008752228,0.00008559697,0.000106672,0.00006484023,0.0001493484,0.0002559928,0.0001838578,0.0001715217,0.001603929],"category_scores_gemma":[0.0001089601,0.00009329375,0.0001575555,0.0001026215,0.0001237969,0.0002187133,0.0001556248,0.0002830194,0.0004100919],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003265192,"about_ca_system_score_gemma":0.0001852261,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005687537,"about_ca_topic_score_gemma":0.0004819209,"domain_scores_codex":[0.9999466,0.000002830854,0.000001545926,0.000009070533,0.00003208551,0.000007913135],"domain_scores_gemma":[0.9999584,0.00001204256,0.00001212941,0.000005128604,0.000009377344,0.000002879697],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001139298,0.00002823425,0.003887497,0.0001806133,0.00001735832,0.0002389151,0.0001231452,0.01101439,0.9343551,0.005495003,0.000972398,0.04357333],"study_design_scores_gemma":[0.00001478634,0.0002454677,0.01117575,0.00002038405,0.00001614742,0.0005040036,0.00008611503,0.05567438,0.9060084,0.00126931,0.0249656,0.00001962245],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.895798,0.00125172,0.08243601,0.0002303041,0.00005935006,0.0000489727,0.0004132401,0.0007036889,0.01905882],"genre_scores_gemma":[0.9689285,0.0006078542,0.02325291,0.00002734907,0.000005513849,0.00003115733,0.0003092591,0.00006564004,0.006771891],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001603929,"threshold_uncertainty_score":0.00536567,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007635466315096779,"score_gpt":0.2031628668615009,"score_spread":0.1955274005464041,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}