{"id":"W7162134365","doi":"10.82308/34615","title":"Microfabrication : using bulk wet etching with TMAH","year":2005,"lang":"en","type":"dissertation","venue":"","topic":"Nanofabrication and Lithography Techniques","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"","keywords":"Microfabrication; Etching (microfabrication); Silicon; Reactive-ion etching; Ammonium hydroxide; Dry etching; Isotropic etching; Bulk micromachining","routes":{"ca_aff":false,"ca_fund":false,"ca_venue":false,"about_ca":true,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002047734,0.0003396139,0.000322873,0.0002604582,0.0002531897,0.0004483109,0.0004773583,0.0003460401,0.002534031],"category_scores_gemma":[0.0001649336,0.0003212279,0.0004232791,0.000271173,0.0001795744,0.0004240048,0.0003376247,0.0004898473,0.001115768],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000308242,"about_ca_system_score_gemma":0.0002586053,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0007167356,"about_ca_topic_score_gemma":0.00124438,"domain_scores_codex":[0.9997582,0.00001132297,0.000007287965,0.00005531665,0.0001366545,0.00003120438],"domain_scores_gemma":[0.9999343,0.00001650496,0.00001069844,0.00001363897,0.0000194522,0.000005341927],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002891763,0.00002818258,0.0001076134,0.0002063513,0.00001297801,0.00005440915,0.0000730374,0.0008964942,0.9712061,0.0007703362,0.0007918489,0.02582373],"study_design_scores_gemma":[0.0000225917,0.0001953787,0.0006893121,0.00001653153,0.00001655271,0.0002738476,0.00003125576,0.007901725,0.9743893,0.0003262825,0.01612347,0.00001377108],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.5224385,0.01369319,0.4075758,0.0005994954,0.0006602429,0.0005348996,0.00061169,0.003488301,0.05039798],"genre_scores_gemma":[0.6854593,0.004847295,0.2768491,0.0002665142,0.00009176875,0.0002152946,0.0005663717,0.0003541186,0.03135018],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002534031,"threshold_uncertainty_score":0.008477151,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007422312049473041,"score_gpt":0.2390452751008642,"score_spread":0.2316229630513912,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}