{"id":"W759364117","doi":"10.1116/1.4926382","title":"Influence of atomic layer deposition valve temperature on ZrN plasma enhanced atomic layer deposition growth","year":2015,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":12,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"Natural Sciences and Engineering Research Council of Canada; Canadian Network for Research and Innovation in Machining Technology, Natural Sciences and Engineering Research Council of Canada; Alberta Innovates - Technology Futures","keywords":"Atomic layer deposition; Evaporation; Materials science; Electrical resistivity and conductivity; Deposition (geology); Layer (electronics); Thin film; Boiling point; Condensation; Plasma; Nanotechnology; Chemistry; Organic chemistry; Thermodynamics; Electrical engineering","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002059836,0.0002592803,0.0003433069,0.0001688027,0.0001689289,0.0004738233,0.0002819147,0.0002288291,0.001218402],"category_scores_gemma":[0.0008917034,0.0002408775,0.0001905643,0.0001386689,0.0002299853,0.0003290441,0.0002090289,0.0002858191,0.0002243586],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002283372,"about_ca_system_score_gemma":0.0001530668,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0007294401,"about_ca_topic_score_gemma":0.000766841,"domain_scores_codex":[0.9997765,0.00003109602,0.00001993947,0.000058518,0.00006726907,0.00004674333],"domain_scores_gemma":[0.9994808,0.0003221066,0.00007544274,0.00004144433,0.0000566129,0.00002371114],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0003397073,0.00002607213,0.000898578,0.0001161819,0.00001466405,0.0001488236,0.00008633226,0.0009667196,0.9943874,0.0001223523,0.00006083787,0.002832219],"study_design_scores_gemma":[0.00001004818,0.000234183,0.002376572,0.000007360302,0.0000180306,0.00007048375,0.00003413732,0.001948163,0.994665,0.00001984927,0.0006089566,0.000007158876],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9951119,0.001180285,0.001978033,0.00004981743,0.00004459094,0.00001234898,0.0001031055,0.000132418,0.001387501],"genre_scores_gemma":[0.9982135,0.0004320492,0.0008552212,0.00001321029,0.000006535859,0.000004882186,0.00004781653,0.00003568743,0.0003910501],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001218402,"threshold_uncertainty_score":0.004076004,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009975511769306767,"score_gpt":0.2329775058835565,"score_spread":0.2230019941142497,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}