{"id":"W779201359","doi":"","title":"Tunable Focused X-rays For Patterning and Lithography","year":2012,"lang":"en","type":"dissertation","venue":"MacSphere (McMaster University)","topic":"Advanced X-ray Imaging Techniques","field":"Physics and Astronomy","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"Strong; National Research Council Canada; Western Economic Diversification Canada; Canadian Institutes of Health Research; Office of Science; Canada Research Chairs; University of Saskatchewan; Basic Energy Sciences; Canadian Light Source; Natural Sciences and Engineering Research Council of Canada; McMaster University; U.S. Department of Energy","keywords":"Lithography; Nanotechnology; Materials science; X-ray lithography; Optoelectronics; Resist","routes":{"ca_aff":false,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002633322,0.0006357194,0.000321114,0.0003846111,0.0003515441,0.0006917676,0.0007926237,0.0005551166,0.008522226],"category_scores_gemma":[0.0002510381,0.000438421,0.0002734298,0.0003956536,0.0002486057,0.0006026194,0.0005602164,0.0008689028,0.003153317],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005521501,"about_ca_system_score_gemma":0.0002727011,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002126022,"about_ca_topic_score_gemma":0.0006384925,"domain_scores_codex":[0.9996914,0.00002207644,0.00002165153,0.00008899717,0.0001350732,0.00004089954],"domain_scores_gemma":[0.9998552,0.00003040842,0.00003219706,0.00004303654,0.00002957576,0.000009663245],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004392327,0.00002641008,0.0002475409,0.0003678538,0.00001593109,0.0001154321,0.00008378967,0.0003688374,0.9678409,0.00469985,0.002625198,0.0235644],"study_design_scores_gemma":[0.00001653223,0.0000931911,0.0007230086,0.00004416774,0.00001344981,0.000298195,0.00003873773,0.00129537,0.9423974,0.0004401767,0.05462212,0.00001763707],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.4797168,0.03068956,0.343475,0.001638621,0.001368069,0.001346697,0.003989086,0.007871981,0.1299042],"genre_scores_gemma":[0.6006683,0.0135235,0.3058796,0.0009156978,0.0001392674,0.001037227,0.00249072,0.000773224,0.0745725],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.008522226,"threshold_uncertainty_score":0.02850962,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0109777289449309,"score_gpt":0.2257994726674744,"score_spread":0.2148217437225435,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}