{"id":"W82273590","doi":"10.1007/1-4020-3013-4_30","title":"Silicon-on-Insulator Substrates with Buried Ground Planes (GPSOI)","year":2005,"lang":"en","type":"book-chapter","venue":"","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Silicon on insulator; Materials science; Ground plane; Optoelectronics; Wafer; Silicon; Capacitor; Substrate (aquarium); Dielectric; Electronic engineering; Layer (electronics); Electrical engineering; Electronic circuit; Integrated circuit; Silicide; Engineering; Nanotechnology; Voltage","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00007522856,0.0004809049,0.0001941078,0.0003668675,0.0001938607,0.00101237,0.0004160411,0.0003948821,0.009225674],"category_scores_gemma":[0.00008383192,0.0002167831,0.0001580629,0.000748034,0.0002371419,0.000686262,0.0002808714,0.0005049093,0.005823997],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002519839,"about_ca_system_score_gemma":0.000175125,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002588338,"about_ca_topic_score_gemma":0.001027143,"domain_scores_codex":[0.9999455,0.000003849392,0.000002837335,0.00001033329,0.00003228074,0.000005166189],"domain_scores_gemma":[0.9999516,0.00001776663,0.000005306715,0.000008443396,0.00001208755,0.000004734817],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"design_other","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000493404,0.00007014658,0.0003581074,0.001060424,0.00001370446,0.0008283212,0.000432463,0.001919012,0.191083,0.106493,0.03880036,0.6588922],"study_design_scores_gemma":[0.000005131873,0.0001044568,0.0005722574,0.0001289502,0.00001006613,0.002040206,0.0000988943,0.001175965,0.04948783,0.01133594,0.9350285,0.00001191175],"study_design_candidate":"bench_or_experimental","study_design_consensus":null,"genre_codex":"other","genre_gemma":"methods","genre_scores_codex":[0.05666177,0.07445271,0.1429335,0.0008311843,0.001559588,0.0001190666,0.0007876816,0.001775406,0.7208791],"genre_scores_gemma":[0.1137273,0.05099132,0.106999,0.0005006567,0.0002602107,0.00007714212,0.001166438,0.0003869851,0.725891],"genre_candidate":"methods","genre_consensus":null,"teacher_disagreement_score":0.009225674,"threshold_uncertainty_score":0.03086293,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01440059739572368,"score_gpt":0.1909838999933344,"score_spread":0.1765833025976107,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}