{"id":"W96659943","doi":"","title":"Study on birefringence of anisotropically micromachined SOI waveguides","year":2005,"lang":"en","type":"article","venue":"","topic":"Advanced Surface Polishing Techniques","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Concordia University","funders":"","keywords":"Silicon on insulator; Surface micromachining; Birefringence; Materials science; Microelectromechanical systems; Wafer; Optoelectronics; Optics; Bulk micromachining; Silicon photonics; Stress (linguistics); Silicon; Fabrication; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00006988798,0.0001257947,0.0001556335,0.00006183545,0.00002124833,0.00001117923,0.0002068637,0.00003708293,0.0000349],"category_scores_gemma":[0.00003347831,0.0001117404,0.00003223836,0.00009197602,0.00002098831,0.0001156251,0.00004061151,0.0001090129,0.00002860603],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0000577915,"about_ca_system_score_gemma":0.000005355403,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0000241114,"about_ca_topic_score_gemma":0.00006039305,"domain_scores_codex":[0.9993381,0.00001373258,0.0002224891,0.0001296399,0.0001296814,0.0001663917],"domain_scores_gemma":[0.9995799,0.0000415637,0.00002162526,0.0002922442,0.00002408168,0.00004055263],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00005115588,0.0009737235,0.03517061,0.00007884113,0.0001804028,0.00002442737,0.002922655,0.1115769,0.788951,0.009659544,0.005357646,0.04505303],"study_design_scores_gemma":[0.0005745564,0.0005748934,0.05095107,0.00004934567,0.00001866626,0.000004705263,0.0002703867,0.01165292,0.9309445,0.001024398,0.003441565,0.0004929686],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9595366,0.00004654061,0.02738642,0.00006646459,0.00004256756,0.0001962845,0.000003323674,0.001195971,0.0115259],"genre_scores_gemma":[0.9043633,0.00001036617,0.09541626,0.000036301,0.00002814774,0.000008044172,4.689181e-7,0.00002696229,0.0001101803],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1419935,"threshold_uncertainty_score":0.4556639,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01647095142481877,"score_gpt":0.2718043066446122,"score_spread":0.2553333552197935,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}