Towards Automated Nanomanipulation under Scanning Electron Microscopy
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Robotic nanomanipulation under electron microscopy; 'reproducibility' here refers to a manipulation procedure, a polysemy trap.
It develops and evaluates automated nanowire manipulation technology, with reproducibility referring to process performance.
Automated SEM nanomanipulation is materials/robotics engineering, not metaresearch.
Résumé
Robotic Nanomaterial Manipulation inside scanning electron microscopes (SEM) is useful for prototyping functional devices and characterizing one-dimensional nanomaterialâs properties. Conventionally, manipulation of nanowires has been performed via teleoperation, which is time-consuming and highly skill-dependent. Manual manipulation also has the limitation of low success rates and poor reproducibility. This research focuses on a robotic system capable of automated pick-place of single nanowires. Through SEM visual detection and vision-based motion control, the system transferred individual silicon nanowires from their growth substrate to a microelectromechanical systems (MEMS) device that characterized the nanowiresâ electromechanical properties. The performances of the nanorobotic pick-up and placement procedures were quantified by experiments. The system demonstrated automated nanowire pick-up and placement with high reliability. A software system for a load-lock-compatible nanomanipulation system is also designed and developed in this research.
Conservé avec la notice de tri, où il sert de preuve aux étiquettes ci-dessus.
La notice
- Revue
- Library and Archives Canada (Government of Canada)
- Thématique
- Electron and X-Ray Spectroscopy Techniques
- Domaine
- Materials Science
- Établissements canadiens
- —
- Organismes subventionnaires
- University of Toronto
- Mots-clés
- Scanning electron microscopeNanotechnologyMicroscopyElectron microscopeMaterials scienceOpticsPhysics
- Résumé présent dans OpenAlex
- oui