Fabrication of a self-absorbing, self-supported complementary metal-oxide-semiconductor compatible micromachined bolometer
Why this work is in the frame
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Bibliographic record
Abstract
This work describes a fabrication process for the manufacturing of a surface micromachined microbridge-type bolometer for infrared thermal imaging applications, which is compatible with any standard complementary metal-oxide-semiconductor process. The bolometer uses a high resistivity amorphous GexSi1−xOy active layer incorporated in a self-absorbing structure for infrared radiation, requiring no additional absorber layer. The device is surface micromachined for thermal isolation and is self-supported by its contact metal legs, with no additional support structure. The design uses a vertical current flow arrangement suitable for a high resistivity a-GexSi1−xOy sensing layer and both sandwich and sandwich-gap configurations are demonstrated. Optimum polyimide sacrificial layer patterning for subsequent deposition of layers is described and optimum metal thickness for the required sheet resistance is studied. A planar surface for the deposited semiconductor layer is obtained by using a recessed base electrode structure. Finally optimum conditions for plasma releasing of the structure are described.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.001 | 0.002 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it