Fabrication of a self-absorbing, self-supported complementary metal-oxide-semiconductor compatible micromachined bolometer
Bibliographic record
Abstract
This work describes a fabrication process for the manufacturing of a surface micromachined microbridge-type bolometer for infrared thermal imaging applications, which is compatible with any standard complementary metal-oxide-semiconductor process. The bolometer uses a high resistivity amorphous GexSi1−xOy active layer incorporated in a self-absorbing structure for infrared radiation, requiring no additional absorber layer. The device is surface micromachined for thermal isolation and is self-supported by its contact metal legs, with no additional support structure. The design uses a vertical current flow arrangement suitable for a high resistivity a-GexSi1−xOy sensing layer and both sandwich and sandwich-gap configurations are demonstrated. Optimum polyimide sacrificial layer patterning for subsequent deposition of layers is described and optimum metal thickness for the required sheet resistance is studied. A planar surface for the deposited semiconductor layer is obtained by using a recessed base electrode structure. Finally optimum conditions for plasma releasing of the structure are described.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.001 |
| Meta-epidemiology (narrow) | 0.000 | 0.001 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.001 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.001 | 0.001 |
| Open science | 0.002 | 0.001 |
| Research integrity | 0.001 | 0.001 |
| Insufficient payload (model declined to judge) | 0.002 | 0.001 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".