High-resolution pattern generation using the epoxy novolak SU-8 2000 resist by electron beam lithography
Why this work is in the frame
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Bibliographic record
Abstract
We report the fabrication of high-resolution sub 50 nm patterns by electron beam lithography using the epoxy novolak SU-8 2000 resist formulation. The minimum linewidth achieved is on the order of 30 nm and corresponds to a threefold reduction in minimum linewidth over previous reports describing similar resist chemistries. Our results also show that it is possible to fabricate dense linear grating elements without proximity correction. The dry etch resistance of native SU-8 2000 was found to be nearly twice that of poly(methylmethacrylate), making it ideal for applications that require pattern transfer. These studies are intended to explore the feasibility of SU-8 2000 as an electron beam resist for pattern generation on length scales below 50 nm.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.001 | 0.002 |
| Science and technology studies | 0.001 | 0.001 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it