High Rate Chemical Mechanical Polishing of Boron-Doped Polycrystalline Silicon
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Bibliographic record
Abstract
In this paper, the effect of lubrication on the polish rate and the surface quality of highly boron-doped polysilicon is presented. The mechanical effects of polishing were studied by altering the CMP process and lubrication regime. It was shown that increasing the polish velocity and slurry flow rate does not always increase the polish rate and that the lubrication behavior plays a dominant role in this process. Increasing the mechanical forces and altering the lubrication regime to boundary and dry lubrication were the key factors which resulted in a maximum polish rate. The maximum polish rate for the boron-doped polysilicon with 3.4 mΩ.cm −1 resistivity was ∼0.75μ/min and achieved in the dry lubrication regime. The coefficient of friction (COF) was also studied and agreed with the polish rate values where the dry lubrication polishing showed highest COF following the Stribeck curve. Finally the surface quality of the polished wafers were studied by AFM and it was shown that the lubrication behavior and friction force had minor effect on the surface roughness and all the wafers were perfectly smooth after polishing (R q ∼2Å).
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.001 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.001 | 0.001 |
| Science and technology studies | 0.000 | 0.001 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it