High Rate Chemical Mechanical Polishing of Boron-Doped Polycrystalline Silicon
Bibliographic record
Abstract
In this paper, the effect of lubrication on the polish rate and the surface quality of highly boron-doped polysilicon is presented. The mechanical effects of polishing were studied by altering the CMP process and lubrication regime. It was shown that increasing the polish velocity and slurry flow rate does not always increase the polish rate and that the lubrication behavior plays a dominant role in this process. Increasing the mechanical forces and altering the lubrication regime to boundary and dry lubrication were the key factors which resulted in a maximum polish rate. The maximum polish rate for the boron-doped polysilicon with 3.4 mΩ.cm −1 resistivity was ∼0.75μ/min and achieved in the dry lubrication regime. The coefficient of friction (COF) was also studied and agreed with the polish rate values where the dry lubrication polishing showed highest COF following the Stribeck curve. Finally the surface quality of the polished wafers were studied by AFM and it was shown that the lubrication behavior and friction force had minor effect on the surface roughness and all the wafers were perfectly smooth after polishing (R q ∼2Å).
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".