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Record W2116942103 · doi:10.1109/ultsym.2009.5441621

2-D CMUT wafer bonded imaging arrays with a row-column addressing scheme

2009· article· en· W2116942103 on OpenAlex

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.

Bibliographic record

Venuenot available
Typearticle
Languageen
FieldEngineering
TopicUltrasonics and Acoustic Wave Propagation
Canadian institutionsUniversity of Waterloo
FundersNational Science Foundation
KeywordsCapacitive micromachined ultrasonic transducersMaterials scienceWaferCapacitive sensingSilicon on insulatorBandwidth (computing)TransducerCenter frequencyOptoelectronicsFabricationSilicon nitrideUltrasonic sensorAcousticsSiliconElectronic engineeringElectrical engineeringEngineeringBand-pass filterPhysicsTelecommunications

Abstract

fetched live from OpenAlex

This paper presents fabrication and characterization results of two-dimensional capacitive micromachined ultrasonic transducer arrays which use a row-column addressing scheme. The devices are fabricated using a wafer bonding process where both the insulation layer and the membrane are user deposited silicon nitride. Two types of arrays with different resonant frequencies are presented. One is a 32×32 element array which has a resonant frequency of 15 MHz. In immersion, when transmitting and receiving with columns a centre frequency of 5.45 MHz is measured with a relative -6 dB bandwidth of 119%. Using rows, a centre frequency of 5.75 MHz is measured with a -6 dB bandwidth of 135%. The other device is a 32×32 element array with a resonant frequency of 28 MHz and in immersion has a centre frequency of ~12 MHz. Membrane resonant frequency uniformity across the 15 MHz device has a measured standard deviation of 0.3%.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: none
GenreCandidate signal: Empirical · Consensus signal: none
Teacher disagreement score0.897
Threshold uncertainty score0.460

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.008
GPT teacher head0.198
Teacher spread0.190 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Quick stats

Citations35
Published2009
Admission routes1
Has abstractyes

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