Thermoelastic damping in bilayered micromechanical beam resonators
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Bibliographic record
Abstract
A detailed analysis of thermoelastic damping (TED) is essential in the design of the next generation of layered composite microresonators employed in microelectromechanical systems (MEMS) for sensing and communications. Here, we present an exact theory to compute the frequency dependence of thermoelastic damping in asymmetric, bilayered, micromechanical Euler–Bernoulli beam resonators. Comparison of the computed values for thermoelastic damping with previously measured internal friction in Au/SiO2 microcantilevers suggests that TED contributes significantly to damping at higher modes and frequencies (∼1 MHz), but is negligible at lower frequencies, in these structures. The utility of the theory for MEMS design is illustrated by considering the representative example of Al/SiC bilayered microresonators. 1.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
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Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
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