Structural Changes in Tungsten and Tantalum Wires in Catalytic Chemical Vapor Deposition Using 1,3-Disilacyclobutane
Bibliographic record
Abstract
Metal wires (typically made of W or Ta) serve as catalysts to decompose the precursor gases to form reactive species in the technique of catalytic chemical vapor deposition. The reactions of these reactive species with the heated wire cause structural changes in the wire, which affect its catalytic properties and lifetime. Here, we report a systematic study on characterizing the structural changes in W and Ta wires when they are exposed to 1,3-disilacylobutane, a useful single-source precursor for SiC film deposition. We have shown that filament temperature, reaction time, and filament material are among the important factors in determining the nature of metal alloys formed. Formation of crystalline W 2 C, SiC, and W 5 Si 3 (weak) was observed on W, whereas crystalline TaC, SiC, and Ta 5 Si 3 (weak) were formed on Ta. While both filaments proved to form cubic crystalline 3C-SiC at low temperatures, alloying has taken different paths at higher temperatures. Between 1400 and 2400 °C, alloying in W was dominated by the formation of W 2 C with little contribution from WC. For Ta, the main alloy formed was TaC in the temperature range of 1400–2000 °C. Heating the aged Ta filament to temperatures higher than 2000 °C tended to recover the metal wire. This same practice does not seem to work for W wires since more W 2 C is formed at high temperatures. It is concluded that Ta outperforms W for SiC film growth in its resistance to forming more carbides and its ability to recover at high temperatures.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".