Electron Beam Lithography on Irregular Surface Using Grafted PMMA Monolayer as Resist
Bibliographic record
Abstract
An electron beam resist is usually coated by conventional coating methods such as spin‐coating, which cannot be reliably applied on irregular surfaces. Here, it is demonstrated that a monolayer resist can be grafted on nonflat surface to enable nanofabrication on it. As a proof‐of‐concept of patterning on irregular surfaces, poly(methyl methacrylate) (contains 1.6% methacrylic acid that has the carboxyl group needed for grafting) is chosen and is grafted on irregular surfaces by thermal treatment which induces a chemical reaction of the carboxyl group with the hydroxyl group on substrate. Subsequently, nanostructures are patterned by electron beam lithography on this monolayer resist grafted on nonflat surface such as atomic force mocroscopy (AFM) cantilevers, and then the patterns are transferred to the layer underneath. A high resolution of 30 nm line width is achieved using this monolayer resist. Nanofabrication on irregular surfaces may have applications in the fields of tip‐enhanced Raman spectroscopy for chemical analysis and lab‐on‐fiber technology for sensor applications.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.002 | 0.001 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".