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Record W2900290057 · doi:10.1109/jmems.2018.2878657

Frequency Tuning and Efficiency Improvement of Piezoelectric MEMS Vibration Energy Harvesters

2018· article· en· W2900290057 on OpenAlex

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.
fundA Canadian funder is recorded on the work.

Bibliographic record

VenueJournal of Microelectromechanical Systems · 2018
Typearticle
Languageen
FieldEngineering
TopicInnovative Energy Harvesting Technologies
Canadian institutionsMemorial University of Newfoundland
FundersNatural Sciences and Engineering Research Council of CanadaMemorial University of NewfoundlandResearch and Development Corporation of Newfoundland and LabradorCanada Foundation for InnovationCMC Microsystems
KeywordsMicroelectromechanical systemsUnimorphProof massVoltageGenetic algorithmVibrationPiezoelectricityEnergy harvestingWaferBeam (structure)Energy (signal processing)Electronic engineeringMechanical engineeringComputer scienceAcousticsMaterials scienceEngineeringElectrical engineeringMathematicsPhysicsOptoelectronicsStructural engineering

Abstract

fetched live from OpenAlex

Although lots of efforts have been made to produce the optimal piezoelectric MEMS vibration energy harvesters in the past decade, the state-of-the-art study is still dependent on the designers' discretion, which demands a considerable amount of design time to gain optimum structure. In this paper, we propose a new design automation technique with minimum human effort based on a genetic algorithm (GA), which is an evolutionary computation method for optimizing complex problems. In this regard, the analytic equations to estimate resonant frequency and amplitude of the harvested voltage for two different configurations of unimorph MEMS piezoelectric harvesters (i.e., with and without integration of a proof mass) are presented. Thanks to the sufficient estimation accuracy, they are utilized as the required fitness functions of the GA. By simultaneously considering operation at lower frequency and higher energy conversion efficiency in a small silicon area as the objectives, the GA strives to optimize the physical aspects of the harvesters (e.g., beam length, beam width, and proof mass length). The GA performance is studied and evaluated analytically, numerically, and experimentally with its effects on the mechanical properties discussed. By leveraging the micro-fabrication process, we demonstrate that the GA can optimize the mechanical geometry of the prototyped harvester effectively and efficiently, whose peak harvested voltage increases from 310 to 1900 mV at the reduced resonant frequency from 886 to 425 Hz with the highest normalized voltage density of 163.88 among the alternatives.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.001
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.344
Threshold uncertainty score0.674

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0010.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.001
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.008
GPT teacher head0.199
Teacher spread0.191 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it