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Using deep learning approaches to overcome limited dataset issues within semiconductor domain

2019· article· en· W3002607153 on OpenAlex

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.

Bibliographic record

Venuenot available
Typearticle
Languageen
FieldMaterials Science
TopicMachine Learning in Materials Science
Canadian institutionsPolytechnique Montréal
Fundersnot available
KeywordsComputer scienceDeep learningDomain (mathematical analysis)Artificial intelligenceMachine learningData scienceMathematics

Abstract

fetched live from OpenAlex

Today, in semiconductor manufacturing, wafer failures are frequent problems with the production lines. To increase the production yield, images are the most important pieces of data used to detect defect-free wafers. However, there are many tools that can be installed specifically to monitor production lines, inspect mapped defects and detect the main causes of die failures by using wafers images during semiconductor manufacturing process. The underlying objective is to overcome the need for a physical check on the wafer which are in most cases too long. Thus, the need to have a design that will measure and detect these visual faults in an automated fashion is a big challenge for the industry. Recently, deep learning approaches have proven to be a suitable way to overcome this issue. However, they rely on the availability of sufficiently representative datasets which is not our case: data on anomalies is scarce. The goal of this paper is to evaluate state of the art deep learning methodology such as GAN and VAE to overcome this challenge. Implementation results show that the GAN architecture achieves a convincing image generation in a limited sample setting, while the VAE architecture fails to converge at training time.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.002
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesMeta-epidemiology (narrow), Insufficient payload (model declined to judge)
Consensus categoriesInsufficient payload (model declined to judge)
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.237
Threshold uncertainty score1.000

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0020.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0010.001
Open science0.0010.001
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0080.004

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.113
GPT teacher head0.308
Teacher spread0.195 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Quick stats

Citations2
Published2019
Admission routes1
Has abstractyes

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