On Precision Motion Control for an Industrial Long-Stroke Motion System with a Nonlinear Micropositioning Actuator
Bibliographic record
Abstract
In this study, we propose a control technique that can be used to significantly reduce the tracking error of a short-stroke motion system whose dynamics are considered totally unknown with possibly input and output nonlinearities. As an example, the tracking performance of a uni-axial piezoceramic actuated positioning stage is examined under mainly sinusoidal test input signals with various frequencies and amplitudes, where we show that the proposed controller does invert the plant dynamics. Interestingly, neither modeling nor identification of the stage dynamics is needed. Mainly, the indented operation bandwidth is the only needed information when the proposed controller is synthesized. Experimental results demonstrate the effectiveness of the proposed approach when the piezoceramic actuated stage is attached to an existing long-stroke positioning motion system as an add-on to motivate the former usefulness in specifically enhancing the performance of wafer scanner machines used in semiconductor manufacturing.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".