Optically Transparent Flexible IGZO TFTs Fabricated with a Selective Wet-Etch Process
Notice bibliographique
Résumé
The emerging transparent thin-film transistor (TFTs) technology has recently received great attention in the active-matrix organic light-emitting diode (AMOLED) flexible displays. This TFT technology also has the potential to enable enhanced functionality in conventional large-area electronics applications ranging from smart windows and heads-up displays to flexible sensor arrays. During the past few years, amorphous transition-metal oxides have been suggested to be one of the best candidates in this application. Amorphous InGaZnO (IGZO) TFTs are the most promising transparent-metal oxide semiconductor due to its high optical transparency and field-effect mobility (μ FE ) in TFT devices compared to conventional amorphous silicon (a-Si:H). The amorphous structure is more suitable for large-area processes than other polycrystalline metal-oxide TFTs. These unique advantages have resulted in the rapid development of IGZO TFT technology. Given the relatively poor selectivity to common semiconductor etchants, IGZO TFTs are typically fabricated using lift-off processes to define the electrical contacts. However, the success of the emerging transition-metal oxide materials system for flexible electronics requires compatibility with conventional TFT microfabrication manufacturing processes. Flexible IGZO TFTs having 85% optical transparency in the visible regime were fabricated on polyethylene napthalate substrates using a selective wet etching process to eliminate the need for lift-off processing. The devices were processed directly onto the plastic platform at a maximum temperature of 150°C. The TFT structure consisted of a sputtered 100 nm aluminum doped zinc oxide (AZO) gate electrode, a 300nm SiN x gate dielectric deposited using plasma enhanced chemical vapor deposition (PECVD) method at 150ºC, and a 50nm IGZO layer deposited using RF sputtering at room temperature. A 150 nm AZO source/drain (S/D) electrodes were deposited by using RF sputtering at 150ºC and patterned wet etching process in diluted HCl solution having a selectivity of 11 between AZO and IGZO. The channel width and length of the studied TFTs were 200 and 100 µm, respectively. The fabricated TFTs exhibited a field-effect mobility of ~10 cm 2 /V.sec, threshold voltage of ~5.0 V, a sub-threshold swing of 0.8 V/decade, and an I on /I off ratio of 10 7 . No current crowding behavior was observed for the TFTs at the low drain-source voltage (V D ) regime. The I-V characteristics showed excellent ohmic contacts can be fabricated using AZO S/D electrodes through a wet etching process and promises a more conventional approach to large-area flexible electronics fabrication. The highly selective etching process provides a means to fabricate IGZO based circuits with low processing complexity that will enable system-on-“plastic” integration of flexible transparent flexible displays. In addition, the effect of long-term electrical bias on the electrical stability of the devices will also be presented.
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Prédiction distillée sur la base complète
Imitation des enseignantsNi prévalence calibrée, ni vérité terrain. Validation humaine à venir. Apprise à partir de 10 348 étiquettes directes de Codex et de 10 348 étiquettes directes de Gemma. Le mode candidate est l'union des têtes enseignantes seuillées; le consensus est leur intersection. Ces sorties portent le statut machine_predicted_unvalidated et ne sont ni des étiquettes humaines ni des étiquettes directes de modèles de pointe.
Scores Codex et Gemma par catégorie
| Catégorie | Codex | Gemma |
|---|---|---|
| Métarecherche | 0,000 | 0,000 |
| Méta-épidémiologie (sens strict) | 0,000 | 0,000 |
| Méta-épidémiologie (sens large) | 0,000 | 0,000 |
| Bibliométrie | 0,000 | 0,001 |
| Études des sciences et des technologies | 0,000 | 0,000 |
| Communication savante | 0,000 | 0,000 |
| Science ouverte | 0,000 | 0,000 |
| Intégrité de la recherche | 0,000 | 0,001 |
| Charge utile insuffisante (le modèle a refusé de juger) | 0,000 | 0,000 |
Scores machine (provisoires)
Les deux têtes enseignantes du modèle étudiant, lues sur ce travail. Un score ordonne la base pour la relecture; il n'affirme jamais une catégorie, et le statut de validation accompagne chaque rangée tel quel.
Scores de référence d'un modèle non mature (critères de maturité non atteints, 7 itérations). Un score ordonne; il n'affirme jamais une catégorie.
score_only:v0-immature-baseline · tel quel depuis la passe de notation : score_only signifie que le nombre peut ordonner les travaux, et qu'aucune étiquette de catégorie n'en découleClassification
machine, non validéePrédiction automatique; un appel candidat d’une seule tête enseignante, pas un consensus.
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