Tunable Emission from Europium-Doped Silicon Oxynitride Thin Films
Notice bibliographique
Résumé
This work reports tunable emission of Eu 3+ and Eu 2+ from SiO x N y films fabricated by integrated electron cyclotron plasma enhanced chemical vapor deposition and magnetron sputtering. The photoluminescence (PL) spectra of intense red emission from Eu 3+ around 600 nm and blue broadband emission from 400 to 750 nm of Eu 2+ are observed under daylight conditions with the naked eye. The findings of this work are promising toward the realization of europium doped Si-based materials for photonics and lighting technologies. Silicon (Si) based optoelectronic components are becoming very important for the advanced silicon photonic industry 1 . These optoelectronics components are also highly desirable for biochemical sensor applications in medicine and environmental control 2 . 3,4 However, the indirect band gap of bulk Si has limited its light emission efficiency . Several methods have been developed to engineer Si into an efficient light emitter, and among them, doping Si with rare earth ions has earned significant interest due to their excellent luminescent and chemical stability. Europium (Eu) is one of the promising rare earths that exhibits two optically active states, Eu 2+ and Eu 3+ , making it suitable for a wide range of color emission from the blue to the red spectral region 5 . The emission lines of Eu 3+ correspond to the transitions from the excited 5 D 0 level to the 7 F J (J= 0 to 6) level of the 4f n configuration and generate sharp peaks in the red spectral range. On the other hand, the emission from Eu 2+ occursdue to the electronic transitions from the 4f 6 5d 1 level to the 4f 7 shell, and emission happens between 400 to 800 nm 6 . Thus, Eu is very attractive in the fields of silicon photonics, along with solid state lighting, display, senor and photovoltaic applications 7 . In this study, we have investigated the optical properties and compositions of Eu-doped Si oxynitride thin films prepared by integrated electron cyclotron resonance plasma enhanced chemical vapor deposition and magnetron sputtering (ECR–PECVD) on p-type Si substrates. Different samples were fabricated by varying nitrogen and oxygen flow to understand the effect of the surrounding matrix on the luminescence. Post-deposition annealing was performed at different temperatures ranging from 600 to 1200 O C. The dependencies of the PL properties on Eu concentrations and annealing temperatures were investigated in detail. It is found that films annealed at a temperature higher than 1000 O C produced bright red emission from Eu 3+ and bright blue emission from Eu 2+ , which can be seen under daylight conditions with the naked eye. Furthermore, the existence of Eu-containing phases is confirmed by high-resolution X-ray diffraction spectroscopy (XRD). The stoichiometry of the films is analyzed by Rutherford backscattering spectrometry (RBS) and elastic recoil detection analysis (ERDA). The optical constants and thickness of the films are analyzed by variable angle spectroscopic ellipsometry (VASE). This work highlights the tunable luminescence property of Eu doped SiO x N y thin films, making them promising candidates in light emission systems for optoelectronic platforms. Acknowledgements: This work is funded by NSERC Discovery Grant RGPIN-2019-06023 and ORF Grant ORF-RE 09-051. References Wang Z, Abbasi A, Dave U, et al., Laser Photon Rev . 2017;11(4). doi:10.1002/lpor.201700063 Germer S, Cherkouk C, Rebohle L, Helm M, Skorupa W., SPIE 8767, Integrated Photonics: Materials, Devices, and Applications II . 2013;8767:1-13. doi:10.1117/12.2017275 Tian Y, Chen B, Hua R, et al., J. Appl. Phys . 2011; 109 (5): 53511. doi:10.1063/1.3551584 Tian Y, Chen B, Hua R, et al., Cryst. Eng. Comm . 2012; 14 (5): 1760-1769. doi:10.1039/C1CE06232H Lin Z, Huang R, Wang H, et al., J. Alloys Compd . 2017; 694: 946-951. doi:10.1016/j.jallcom.2016.10.132 Azmi F, Gao Y, Khatami Z, Mascher P., J. Vac. Sci. Technol. A 2022; (043402). doi:10.1116/6.0001761 Bellocchi G, Franzò G, Iacona F, et al., Opt. Express . 2012; 20 (5): 5501-5507. doi:10.1364/OE.20.005501
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Comment cette classification a été obtenuedéplier
Prédiction machine sur la base complète
Imitation des enseignantsNi prévalence calibrée, ni vérité terrain. Validation humaine à venir. Le volet Gemma est une étiquette directe du modèle pour chaque travail de la base, lue sur la notice réduite au titre. Le volet Codex est un classifieur appris des 10 348 étiquettes directes de Codex et calibré sur les taux pondérés de l'échantillon; les champs sans appui suffisant ne portent aucun appel Codex. Le mode candidate est l'union des deux volets; le consensus est leur intersection. Ces sorties portent le statut machine_predicted_unvalidated et ne sont pas des étiquettes humaines.
Scores du classifieur distillé par catégorie (deux têtes)
| Catégorie | Codex | Gemma |
|---|---|---|
| Métarecherche | 0,000 | 0,000 |
| Méta-épidémiologie (sens strict) | 0,000 | 0,000 |
| Méta-épidémiologie (sens large) | 0,000 | 0,000 |
| Bibliométrie | 0,000 | 0,000 |
| Études des sciences et des technologies | 0,000 | 0,000 |
| Communication savante | 0,000 | 0,000 |
| Science ouverte | 0,000 | 0,000 |
| Intégrité de la recherche | 0,000 | 0,000 |
| Charge utile insuffisante (le modèle a refusé de juger) | 0,001 | 0,000 |
Scores machine (provisoires)
Les deux têtes enseignantes du modèle étudiant, lues sur ce travail. Un score ordonne la base pour la relecture; il n'affirme jamais une catégorie, et le statut de validation accompagne chaque rangée tel quel.
Scores de référence d'un modèle non mature (critères de maturité non atteints, 7 itérations). Un score ordonne; il n'affirme jamais une catégorie.
score_only:v0-immature-baseline · tel quel depuis la passe de notation : score_only signifie que le nombre peut ordonner les travaux, et qu'aucune étiquette de catégorie n'en découleClassification
machine, non validéePrédiction automatique; un appel candidat d’une seule source (Gemma direct ou Codex distillé), pas un consensus.
Le détail, modèle par modèle et score par score, se trouve en fin de page sous « Comment cette classification a été obtenue ».