Inkjet Photoresist Printing for Semiconductor Devices
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Notice bibliographique
Résumé
The current industry-dominant method for photoresist deposition is spin-coating. However, as technology continues to advance, specifically in the field of microelectronic mechanical systems (MEMS), the limitations of spin-coating are becoming more apparent. A promising alternative is inkjet printing; a well-developed technology that has been very successful in a multitude of other applications, notably in 3D printing. Aside from offering good results on patterned wafers – filling cavities and eliminating edge beading – this additive technique also holds the advantage of dispensing minute volumes of photoresist, unlike spin-coating, which ejects larger volumes of resist while only 5% to 10% is retained on the substrate. Additionally, it can selectively deposit resist onto required locations on the wafer or directly print patterns, reducing the number of photolithography steps required. This article focuses on developing a process for printing photoresist for photolithography applications using a commercially available SUSS inkjet printer in a manufacturing, cleanroom environment (200 mm Fab, FED STD 209E class 10). A commercially available positive photoresist used for production within C2MI’s facility – whose intended method of deposition is spin-coating – was adapted through dilutions for inkjet printing. The findings included an optimal viscosity within a range of 5.5 cPs to 7.5 cPs (with a ± 1 cPs tolerance) and a surface tension between 28 mN/m and 34 mN/m. A 4.35% coating uniformity on a 1.48 μm thick layer was achieved, on average. Furthermore, sharp printed edges without bleeding were obtained, with a print time of 62 seconds for a blanket print. A simple three-layer proof-of-concept test structure was then designed and fabricated to compare inkjet printing with traditional spin-coating photolithography. Uniformity, thickness, print time, resist volume, and the critical dimension (CD) of the photoresist coatings after photolithography were measured and compared, demonstrating promising results for inkjet printing. Although more work is still needed to bring inkjet printing from a proof-of-concept method to an industry ready technology, the control and precision offered by inkjet printing can lead to advancements in material deposition for a variety of applications in the microfabrication process of MEMS. It has the potential to overcome current limitations of spin-coating and can do so while being a more eco- responsible and cost-effective option by reducing material waste.
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Prédiction distillée sur la base complète
Imitation des enseignantsNi prévalence calibrée, ni vérité terrain. Validation humaine à venir. Apprise à partir de 10 348 étiquettes directes de Codex et de 10 348 étiquettes directes de Gemma. Le mode candidate est l'union des têtes enseignantes seuillées; le consensus est leur intersection. Ces sorties portent le statut machine_predicted_unvalidated et ne sont ni des étiquettes humaines ni des étiquettes directes de modèles de pointe.
Scores Codex et Gemma par catégorie
| Catégorie | Codex | Gemma |
|---|---|---|
| Métarecherche | 0,000 | 0,000 |
| Méta-épidémiologie (sens strict) | 0,000 | 0,000 |
| Méta-épidémiologie (sens large) | 0,000 | 0,000 |
| Bibliométrie | 0,000 | 0,000 |
| Études des sciences et des technologies | 0,000 | 0,000 |
| Communication savante | 0,000 | 0,000 |
| Science ouverte | 0,000 | 0,000 |
| Intégrité de la recherche | 0,000 | 0,000 |
| Charge utile insuffisante (le modèle a refusé de juger) | 0,000 | 0,000 |
Scores machine (provisoires)
Les deux têtes enseignantes du modèle étudiant, lues sur ce travail. Un score ordonne la base pour la relecture; il n'affirme jamais une catégorie, et le statut de validation accompagne chaque rangée tel quel.
Scores de référence d'un modèle non mature (critères de maturité non atteints, 7 itérations). Un score ordonne; il n'affirme jamais une catégorie.
score_only:v0-immature-baseline · tel quel depuis la passe de notation : score_only signifie que le nombre peut ordonner les travaux, et qu'aucune étiquette de catégorie n'en découle