Experimental and Mechanistic Study of Copper Electrodeposition in the Absence and Presence of Chloride Ions and Polyethylene Glycol
Notice bibliographique
Résumé
The trend to miniaturize electronic devices has led to the development of new fabrication processes. Copper electrodeposition has been used extensively in the fabrication of microelectronic circuits due to the excellent conducting properties of this metal. Control of the operating conditions and understanding of the mechanism of metal deposition is necessary in order to successfully produce the micron–scale features required in these new devices. The implementation of new processes and operating conditions in the fabrication of microelectronic devices has spurred a considerable amount of research into their understanding and improvement. \nAn approach to achieve the desired electrodeposits is the incorporation of mixtures of chemical additives into the electroplating solutions. Many modeling and experimental studies have been devoted to exploring the mechanisms by which additives operate. However, details of these mechanisms are not completely understood. A part of this study focuses on the investigation of the conditions and dynamics of the adsorption and desorption of the additives chloride ions and polyethylene glycol (PEG) on copper substrates in voltammetry and multi–step voltammetry–chronoamperometry experiments. Voltammetry scans are classified into three categories according to the range of potentials where the inhibition of Cu2+ reduction in the presence of various concentrations of Cl− and PEG is observed. Each type is explained based on the results of this study and the ideas presented in the literature on how the conformation of adsorbed PEG on the substrate can change during the course of deposition. \nOne of the techniques that is widely used to study electrochemical processes is electrochemical impedance spectroscopy (EIS). Insight into these processes gained from measured EIS data is better when it is combined with the use of a physicochemical model. However, the models typically used involve a number of simplifying assumptions, partly due to mathematical complications. One of the purposes of this study is to relax some of these assumptions such as the neglect of convection, migration and homogeneous reactions and investigate their effect by comparing the model results to experimental data. This approach is applied to Cu2+ reduction onto a rotating disk electrode in acidic additive–free solutions. Estimates of the kinetic parameters are obtained with the non-linear least squares method. A statistical analysis reveals that the model is further improved by accounting for the correlation between consecutive residuals. The experimental data are found to be poorly predicted when the parameters estimated from the full model are used in simpler models that do not include convection and/or homogeneous reactions. \nThe model of Cu2+ reduction in additive–free solutions is extended to account for the presence of Cl− and PEG under transient conditions. The model accounts for the formation of the inhibiting film, blockage of adsorption sites on the electrode surface and displacement of the inhibiting film by depositing copper. A distinction is made between the condition when the electrode is completely covered with the inhibiting film and when it is only partially covered. Estimates of the kinetic parameters are obtained from fitting the model to electrode responses of linear potential scans obtained at various Cl− and PEG concentrations. The model is able to predict both the sudden loss of inhibition that occurs at intermediate Cl− and PEG concentrations and the more gradual increases in current at low and high additive levels. EIS spectra are also predicted and compared to measured ones.
Récupéré en direct depuis OpenAlex et désinversé. Les résumés ne sont pas conservés dans cette base de données : les index inversés représentent 8,6 Go des 9,3 Go de texte de la base, et le serveur dispose de 13 Go libres.
Comment cette classification a été obtenuedéplier
Prédiction distillée sur la base complète
Imitation des enseignantsNi prévalence calibrée, ni vérité terrain. Validation humaine à venir. Apprise à partir de 10 348 étiquettes directes de Codex et de 10 348 étiquettes directes de Gemma. Le mode candidate est l'union des têtes enseignantes seuillées; le consensus est leur intersection. Ces sorties portent le statut machine_predicted_unvalidated et ne sont ni des étiquettes humaines ni des étiquettes directes de modèles de pointe.
Scores Codex et Gemma par catégorie
| Catégorie | Codex | Gemma |
|---|---|---|
| Métarecherche | 0,000 | 0,000 |
| Méta-épidémiologie (sens strict) | 0,000 | 0,000 |
| Méta-épidémiologie (sens large) | 0,000 | 0,000 |
| Bibliométrie | 0,000 | 0,000 |
| Études des sciences et des technologies | 0,000 | 0,000 |
| Communication savante | 0,000 | 0,000 |
| Science ouverte | 0,000 | 0,000 |
| Intégrité de la recherche | 0,000 | 0,000 |
| Charge utile insuffisante (le modèle a refusé de juger) | 0,000 | 0,000 |
Scores machine (provisoires)
Les deux têtes enseignantes du modèle étudiant, lues sur ce travail. Un score ordonne la base pour la relecture; il n'affirme jamais une catégorie, et le statut de validation accompagne chaque rangée tel quel.
Scores de référence d'un modèle non mature (critères de maturité non atteints, 7 itérations). Un score ordonne; il n'affirme jamais une catégorie.
score_only:v0-immature-baseline · tel quel depuis la passe de notation : score_only signifie que le nombre peut ordonner les travaux, et qu'aucune étiquette de catégorie n'en découleClassification
machine, non validéePrédiction automatique; un appel candidat d’une seule tête enseignante, pas un consensus.
Le détail, modèle par modèle et score par score, se trouve en fin de page sous « Comment cette classification a été obtenue ».