Effect of image degradation on nm-scale MEMS FFT optical displacement measurements
Bibliographic record
Abstract
This paper examines the optical measurement of nm-scale MEMS in-plane motion using microphotographs, and the effect of degraded images on these results. Two common forms of image degradation are: blurring caused by the dynamic (AC) motion of the actuator and focus effects due to changes in focal plane or media changes. This paper address whether consistent nm-scale results can still be obtained when the image is thus changed. The motion of MEMS thermal actuators was measured by taking a series of undegraded microphotographs at varying DC voltages that produce displacements of ~2.5 microns. A FFT based algorithm was used to analyze the phase of periodic structures in the image and measure displacements with precision on the order of 20-100 nm. Pristine undegraded measurements were compared with both artificially blurred images as well as manually defocused images. It was found that the FFT method was robust to large amounts of blurring and defocusing.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.004 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.002 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".