A stainless-steel-based capacitive pressure sensor chip and its microwelding integration
Bibliographic record
Abstract
A stainless-steel (SS) chip of capacitive pressure sensor and its new integration method are developed. The sensors are microfabricated through thermal bonding of the chip dies made of medical-grade SS to the Au-polyimide diaphragm film. The capacitive cavity design with dead-end holes is verified to increase the pressure sensitivity. Laser microwelding is applied to permanently bond the sensor chips onto SS substrates. The microwelding is revealed to provide twice the mechanical strength and ∼6× electrical conductance in its bond compared with a conductive epoxy case. The microwelded sensor exhibits an average sensitivity of 120 ppm/mmHg close to its pre-welding level. The welding integration with a SS antenna stent is demonstrated. The results suggest that laser microwelding is a promising packaging technique for SS-based biomedical and implant microdevices that require long-term bond reliability.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.001 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.001 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.001 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.001 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".