Characterization of amorphous GexSi1−xOy for micromachined uncooled bolometer applications
Bibliographic record
Abstract
Thin films of GexSi1−xOy were prepared by reactive magnetron sputtering using simultaneous sputtering of silicon and germanium targets in an environment of oxygen and argon. Silicon and oxygen content were varied from 0 to 30 at. % separately and the effect of the addition of each element on electrical and optical properties of amorphous germanium was studied. The electrical and optical behavior of the compound with varying elemental composition is explained based on the oxidation behavior of the Si and Ge. Increasing the silicon content was found to inhibit the formation of germanium–oxygen bonds. Values of temperature coefficient of resistance as high as −5% K−1 were obtained at moderate resistivity values around 3.8×104 Ω cm. These characteristics could be used to enhance the performance of micromachined uncooled bolometers. The composition control enabled by cosputtering components allows resistivity and activation energy to be tailored to suit different design specifications.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".