Modeling Etching Plasmas: Needs and Challenges in Atomic and Molecular Data
Bibliographic record
Abstract
This paper reviews works of the team to characterize and model chlorine high‐density plasmas. The model allows in particular determining the pressure‐dependence of the concentration of neutral and charged species. Comparison of this model to experimental measurements achieved in high‐density surface‐wave‐produced plasmas shows an excellent agreement for the neutral atomic and molecular species. As far as charged species are concerned, the model reproduces well experiments for atomic chlorine ions and electrons, but some discrepancy occurs for molecular positive ions and negative ions at low pressure. The cause of this discrepancy remains to be clarified but might result from an underestimation of the creation rates of Cl2+ and Cl−. The model seems promising for predicting the ion density in a recently installed ICP reactor.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.003 | 0.006 |
| Meta-epidemiology (narrow) | 0.001 | 0.001 |
| Meta-epidemiology (broad) | 0.001 | 0.001 |
| Bibliometrics | 0.001 | 0.001 |
| Science and technology studies | 0.001 | 0.001 |
| Scholarly communication | 0.003 | 0.004 |
| Open science | 0.003 | 0.001 |
| Research integrity | 0.002 | 0.002 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".