High performance 32nm SOI CMOS with high-k/metal gate and 0.149µm 2 SRAM and ultra low-k back end with eleven levels of copper
Bibliographic record
Abstract
This work presents a 32 nm SOI CMOS technology featuring high-k/metal gate and an SRAM cell size of 0.149 µm2. V min operation down to 0.6 V in a 16Mb SRAM array test vehicle has been demonstrated. Aggressive ground rules are achieved with 193 nm immersion lithography. High performance is enabled by hig-hk/metal gate plus innovation on strained silicon elements including embedded SiGe and dual stress liner (DSL). Gate lengths down to 25 nm have been demonstrated enabling performance without the power penalty from gate capacitance. AC drive currents of 1.55 mA/um and 1.22 mA/um have been achieved at an off-state of 100 nA/µm and V DD of 1 V for NFET and PFET, respectively. For the first time, we have also demonstrated that SOI maintains performance benefit over bulk silicon in high-k/metal gate and 32 nm ground rules.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".