Implantation and annealing of Cu in InP for electrical isolation: microstructural characterisation
Bibliographic record
Abstract
The formation of metallic precipitates to produce embedded Schottky barriers within a conductive layer has been investigated as a potentially new form of implantation-induced isolation. Accordingly, Cu-implanted InP has been characterised with Rutherford backscattering spectrometry, transmission electron microscopy and secondary ion mass spectrometry as functions of implantation and annealing temperatures. Substrates implanted at room temperature were amorphised, resulting in greater post-anneal disorder in the form of microtwins and dislocations. However, annealing-induced Cu diffusion was reduced in such samples as attributed to gettering at end-of-range disorder. Additional defect centres, potentially Cu-based precipitates, were also observed. Further to the structural characterisation presented herein, complementary electrical measurements are necessary to deduce the appropriate combination of residual disorder and precipitate concentration to yield electrical compensation. This will ultimately determine the viability of this isolation technology for producing extremely resistive substrates for very high frequency devices.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".