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Record W1830608248 · doi:10.1109/icsd.1989.69208

Electrical properties of a-SiO/sub x/N/sub y/:H films prepared by microwave PECVD

2003· article· en· W1830608248 on OpenAlexafffund
Philippe Rabiller, J.E. Klemberg-Sapieha, M. R. Wertheimer, A. Yelon

Bibliographic record

Venuenot available
Typearticle
Languageen
FieldEngineering
TopicSemiconductor materials and devices
Canadian institutionsPolytechnique Montréal
FundersNatural Sciences and Engineering Research Council of Canada
KeywordsPlasma-enhanced chemical vapor depositionMicrowaveElectrical resistivity and conductivityChemical vapor depositionMaterials scienceOxideAnalytical Chemistry (journal)Thermal conductionElectronChemical engineeringOptoelectronicsElectrical engineeringChemistryPhysicsTelecommunicationsComposite materialComputer scienceOrganic chemistryMetallurgy

Abstract

fetched live from OpenAlex

The authors report on the electrical properties of P-SiON films (ranging from pure nitride to oxide) prepared by microwave PECVD (plasma-enhanced chemical vapor deposition). These include static and high-frequency permittivities and DC conductivity, all of which vary systematically with film composition. It is shown that conduction in P-SiON occurs by means of field-enhanced thermal excitation of electrons from traps (Poole-Frenkel effect). However, it cannot be asserted that the conductivity is controlled by the Si-H content of the alloy, as indicated by previous studies.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.012
Threshold uncertainty score0.457

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.011
GPT teacher head0.179
Teacher spread0.168 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one teacher head, not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations1
Published2003
Admission routes2
Has abstractyes

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