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Record W1830823100 · doi:10.1139/cjp-2013-0638

Reversible and irreversible effects after oxygen exposure in thick (>1 μm) silicon films deposited by VHF-PECVD on glass substrates investigated by dual beam photoconductivity

2013· article· en· W1830823100 on OpenAlexvenueno aff
Gökhan YILMAZ, Hamza Cansever, H. Muzaffer Sagban, M. Güneş, Vladimir Smirnov, F. Finger, R. Brüggemann

Bibliographic record

VenueCanadian Journal of Physics · 2013
Typearticle
Languageen
FieldEngineering
TopicThin-Film Transistor Technologies
Canadian institutionsnot available
Fundersnot available
KeywordsPhotoconductivityAmorphous siliconPlasma-enhanced chemical vapor depositionAmorphous solidAnalytical Chemistry (journal)MetastabilityMaterials scienceSiliconOxygenConductivityBand gapChemical vapor depositionOptoelectronicsCrystalline siliconPhysicsChemistryCrystallography

Abstract

fetched live from OpenAlex

Metastability and instability effects due to oxygen exposure in thick intrinsic hydrogenated microcrystalline silicon films deposited by very high frequency plasma enhanced chemical vapour deposition on smooth glass substrates were investigated using temperature-dependent dark conductivity, steady state photoconductivity, and sub-bandgap absorption measurements obtained using the dual beam photoconductivity (DBP) method. No significant changes in dark conductivity and photoconductivity were detected even after long-term air exposure of samples in room ambient as well as after oxygen exposure when samples were characterized in oxygen ambient. However, characterization of the oxygen-exposed state in high vacuum caused an increase in dark conductivity and photoconductivity as well as a significant decrease in the sub-bandgap absorption coefficient spectra in the low energy region in samples with [Formula: see text]. These changes are partially irreversible for samples [Formula: see text] and mostly reversible for compact materials with significant amorphous fraction. No detectable metastable changes occurred in microcrystalline silicon samples with [Formula: see text] as well as in pure amorphous silicon.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesMeta-epidemiology (narrow)
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.048
Threshold uncertainty score1.000

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.001
Open science0.0000.000
Research integrity0.0000.001
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.006
GPT teacher head0.169
Teacher spread0.163 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one teacher head, not a consensus.

Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations3
Published2013
Admission routes1
Has abstractyes

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