The use of an in-situ ECR hydrogen plasma to remove the oxide from InP substrates prior to epitaxial growth
Bibliographic record
Abstract
The authors present results of studies on the use of a hydrogen plasma generated by an electron cyclotron resonance (ECR) source in-situ in an MBE (molecular beam epitaxy) growth chamber to remove the surface oxide on InP at temperatures significantly lower than thermal desorption temperatures, thereby eliminating the risk of surface decomposition. It is shown that, for substrate temperatures as low as 400 degrees C, an ECR hydrogen plasma operating with an excess P/sub 2/ flux on the sample surface may be used to remove the oxide from InP substrates prior to epitaxial growth. A typical exposure for this treatment is short (<or= one minute) and at a significantly lower temperature 50 to 100 degrees C less than conventional thermal desorption temperatures, thereby reducing the risk of decomposition of the substrate.<<ETX>>
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".