Processes to achieve vibrating beams for an angular rate measurement sensor
Bibliographic record
Abstract
Vibrating beam structures may be used as sensing elements in an angular rate measurement sensor. Achieving a square cross-sectional area with smooth vertical side walls and sharp edges is necessary for these beams. In this work, fabrication of beams with reasonably smooth vertical sidewalls and accurate dimensions, using anisotropic etching of silicon in TMAH, has been investigated. Beams with various thicknesses (500-100 microns) are fabricated. It is shown that by carefully aligning the mask at 45/spl deg/ from thewafer flat, and by maintaining the concentration of TMAH at 25%, it is possible to achieve smooth vertical sidewalls with good uniformity along the length of the beam. Adequate control over the beam lateral dimension is achieved by etching in a 2-step procedure with the second step at a lower temperature (lower etch rate). Single-sided and double-sided masking techniques are investigated in order to fabricate the beams. An alternative design is presented to form the beams using a standard CMOS process.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.002 | 0.001 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".