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Record W1963539446 · doi:10.1116/1.2172249

Self-organized Cu nanowires on glass and Si substrates from sputter etching Cu/substrate interfaces

2006· article· en· W1963539446 on OpenAlex

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.
fundA Canadian funder is recorded on the work.

Bibliographic record

VenueJournal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2006
Typearticle
Languageen
FieldEngineering
TopicIon-surface interactions and analysis
Canadian institutionsUniversity of Alberta
FundersNatural Sciences and Engineering Research Council of Canada
KeywordsEtching (microfabrication)Materials scienceSputteringSubstrate (aquarium)Layer (electronics)NanowireSputter depositionIsotropic etchingOptoelectronicsCopperThin filmNanotechnologyMetallurgy

Abstract

fetched live from OpenAlex

We have fabricated self-organized ∼30-nm-wide Cu lines on glass and Si(100) substrates by Ar beam etching the Cu/substrate interfaces. We deposited thin Cu layers on the substrates and etched the deposited layer by a neutralized Ar ion beam at a grazing angle of incidence. At the stage when almost all Cu is removed by etching, we have observed Cu lines on the substrate. The lines orientation is entirely controllable through the experiment geometry and the lines are basically similar on glass and Si substrates. By atomistic Monte Carlo simulations, we have demonstrated that the Cu lines result from the self-organized morphologies that develop on Cu surfaces during sputter etching. To better understand ways to control the process we have investigated, by simulations, the line width as a function of the removed depth, surface diffusivity, and Ar beam flux. We have concluded that the sputter etch technique offers a unique opportunity to fabricate controlled arrays of Cu lines on substrates.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.024
Threshold uncertainty score0.894

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0010.001
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.007
GPT teacher head0.203
Teacher spread0.196 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it