High-frequency SAW filters based on diamond films
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Bibliographic record
Abstract
We have developed a diamond SAW resonator capable of operating at frequencies over 3 GHz using a SiO(2)/ interdigital transducer (IDT)/AlN/diamond structure. This structure is expected to have a high Q value and a zero temperature coefficient of frequency (TCF) over 3 GHz, based on the high acoustic velocity of AlN. The SAW characteristics of various layered structures composed of SiO(2)/IDT/AlN/diamond substrates were studied both theoretically and experimentally. The SiO(2)/IDT/AlN/diamond substrate structure allows for a thicker IDT metal layer compared with other SAW device designs, such as the SiO(2)/IDT/ZnO/diamond structure. The thicker metal IDT in the present design leads to a lower series resistance and, in turn, a low insertion loss for SAW devices over 3 GHz. Using a second-mode (Sezawa-mode) SAW, the phase velocity and electromechanical coupling coefficient of the SiO(2)/IDT/AlN/diamond substrate reached the larger values of 11 150 m/s and 0.5%, respectively, and a zero TCF characteristic at 25°C was achieved. One-port SAW resonators fabricated from diamond substrates showed a high Q of 660 at 5.4 GHz. The frequency drift over a temperature range of -25°C to 80°C was about 90 ppm, even less than that for ST-quartz SAW substrates. A two-port resonator showed a low insertion loss of 8 dB at 5.4 GHz. Finally, we designed a 5-GHz band-stop SAW filter. A 30-MHz-wide stopband at a -6-dB rejection level was achieved while keeping the passband insertion loss to 0.76 dB. These characteristics of these filters show good potential for SHF-band filters.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.001 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it